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    • 4. 发明申请
    • MEMS VIBRATION ISOLATION SYSTEM AND METHOD
    • MEMS振动隔离系统及方法
    • WO2013112310A2
    • 2013-08-01
    • PCT/US2013/021408
    • 2013-01-14
    • THE CHARLES STARK DRAPER LABORATORY, INC.
    • BERNSTEIN, JonathanWEINBERG, Marc
    • B81B7/00
    • B81B7/0016
    • A microelectromechanical vibration isolation system includes a microelectromechanical structure having a plurality of fin apertures etched therethrough, and a plurality of fins each disposed within a respective one of the plurality of fin apertures and spaced apart from the microelectromechanical structure so as to define a fluid gap therebetween. The fluid gap is configured to provide squeeze film damping of vibrations imparted upon the microelectromechanical structure in at least two dimensions. The system further includes a frame surrounding the microelectromechanical structure, and a plurality of springs each coupled to the microelectromechanical structure and to the frame. The plurality of springs is configured to support the microelectromechanical structure in relation to the frame.
    • 一种微机电振动隔离系统包括微机电结构,该微机电结构具有蚀刻穿过的多个鳍孔以及多个鳍片,每个鳍片设置在多个鳍孔中的相应的一个内,并与微机电结构 以在其间限定流体间隙。 该流体间隙被配置为在至少两个维度上为施加在微机电结构上的振动提供挤压膜阻尼。 该系统还包括围绕微机电结构的框架和多个弹簧,每个弹簧联接到微机电结构和框架。 多个弹簧构造成相对于框架支撑微机电结构。