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1. 发明申请

WO2011154770A1 METHOD OF MANUFACTURING AN INK-JET PRINTHEAD 审中-公开
标题翻译：制造喷墨打印机的方法
公开(公告)号：WO2011154770A1
公开(公告)日：2011-12-15
申请号：PCT/IB2010/052520
申请日：2010-06-07
申请人： TELECOM ITALIA S.P.A. , BICH, Danilo , GIOVANOLA, Lucia , MERIALDO, Anna , SCHINA, Paolo
发明人： BICH, Danilo , GIOVANOLA, Lucia , MERIALDO, Anna , SCHINA, Paolo
IPC分类号： B41J2/16
CPC分类号： B41J2/162 , B41J2/1433 , B41J2/1603 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1635 , B41J2002/14411 , B41J2002/14475
摘要： Method of manufacturing an ink- jet printhead comprising: providing a silicon substrate (10) including active ejecting elements (11); providing a hydraulic structure layer (20); providing a silicon orifice plate (30) having a plurality of nozzles (31) for ejection of said ink; assembling said silicon substrate (10) with said hydraulic structure layer (20) and said silicon orifice plate (30). Providing said silicon orifice plate (30) comprises: providing a silicon wafer (40) having a substantially planar extension delimited by a first and a second surfaces (41, 42); performing a main etching step at said second surface (42) so as to remove a central portion (43) having a preset height (H); forming in said silicon wafer (40) a plurality of through holes, each defining a respective nozzle (31) for ejection of said ink.
摘要翻译：一种制造喷墨打印头的方法，包括：提供包括有效喷射元件（11）的硅基板（10）; 提供液压结构层（20）; 提供具有用于喷射所述油墨的多个喷嘴（31）的硅孔板（30）; 用所述液压结构层（20）和所述硅孔板（30）组装所述硅衬底（10）。提供所述硅孔板（30）包括：提供具有由第一和第二表面（41,42）限定的基本上平面的延伸的硅晶片（40）; 在所述第二表面（42）处执行主蚀刻步骤以去除具有预设高度（H）的中心部分（43）; 在所述硅晶片（40）中形成多个通孔，每个通孔限定用于喷射所述墨水的相应喷嘴（31）。

2. 发明申请

WO2011154394A1 METHOD OF MANUFACTURING AN INK-JET PRINTHEAD 审中-公开
标题翻译：制造喷墨打印机的方法
公开(公告)号：WO2011154394A1
公开(公告)日：2011-12-15
申请号：PCT/EP2011/059371
申请日：2011-06-07
申请人： TELECOM ITALIA S.P.A. , BALDI, Silvia , BICH, Danilo , GIOVANOLA, Lucia , MERIALDO, Anna , SCHINA, Paolo
发明人： BALDI, Silvia , BICH, Danilo , GIOVANOLA, Lucia , MERIALDO, Anna , SCHINA, Paolo
IPC分类号： B41J2/16
CPC分类号： B41J2/162 , B41J2/1433 , B41J2/1603 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1635 , B41J2002/14411 , B41J2002/14475
摘要： Method of manufacturing an ink-jet printhead comprising: providing a silicon substrate (10) including active ejecting elements (11); providing a hydraulic structure layer (20); providing a silicon orifice plate (30) having a plurality of nozzles (31) for ejection of said ink; assembling said silicon substrate (10) with said hydraulic structure layer (20) and said silicon orifice plate (30). Providing said silicon orifice plate (30) comprises: providing a silicon wafer (40) having a substantially planar extension delimited by a first and a second surfaces (41, 42); performing a thinning step at said second surface (42) so as to remove a central portion (43) having a preset height (H); forming in said silicon wafer (40) a plurality of through holes, each defining a respective nozzle (31) for ejection of said ink.
摘要翻译：一种制造喷墨打印头的方法，包括：提供包括有效喷射元件（11）的硅基板（10）; 提供液压结构层（20）; 提供具有用于喷射所述油墨的多个喷嘴（31）的硅孔板（30）; 用所述液压结构层（20）和所述硅孔板（30）组装所述硅衬底（10）。提供所述硅孔板（30）包括：提供具有由第一和第二表面（41,42）限定的基本平坦的延伸的硅晶片（40）; 在所述第二表面（42）处执行变薄步骤，以去除具有预设高度（H）的中心部分（43）; 在所述硅晶片（40）中形成多个通孔，每个通孔限定用于喷射所述墨水的相应喷嘴（31）。

3. 发明申请

WO2006136194A1 METHOD FOR FABRICATING A TURNING MIRROR FOR OPTICAL DEVICES 审中-公开
标题翻译：用于制造光学装置的旋转镜的方法
公开(公告)号：WO2006136194A1
公开(公告)日：2006-12-28
申请号：PCT/EP2005/006843
申请日：2005-06-24
申请人： TELECOM ITALIA S.P.A. , MERIALDO, Anna , SCHINA, Paolo
发明人： MERIALDO, Anna , SCHINA, Paolo
IPC分类号： G02B6/136 , G02B6/42
CPC分类号： G02B6/4214 , G02B6/122 , G02B6/136
摘要： The present invention relates to a method to fabricate a turning mirror for an optical device 100. The method comprises the steps of providing a substrate, which defines a plane (X,Z) in which an optical signal propagates in a propagating direction (X). The substrate comprises a waveguide including a cladding and a core (8). The substrate is thus dry etched through a first mask aperture (15) so that a trench is obtained in the substrate, said trench comprising at least a substantially perpendicular surface with respect to the optical propagating direction (X). A protecting layer is formed on the substrate so as to cover portions of the outer surface of said substrate parallel to the (X,Z) plane and the at least a substantially perpendicular surface. The substrate is then etched by wet etching using a second masking mask with a second mask aperture (18') to protect portions of the substrate not to be etched so as to form a cavity in the substrate comprising an angled surface having an angle relative to the propagating direction (X). The protecting layer is thus removed so that the etched hole and the trench merge to form a single cavity.
摘要翻译：本发明涉及一种制造光学器件100的转向镜的方法。该方法包括以下步骤：提供限定光学信号在传播方向（X）上传播的平面（X，Z）的衬底，。衬底包括包括包层和芯（8）的波导。因此，衬底通过第一掩模孔（15）被干蚀刻，使得在衬底中获得沟槽，所述沟槽至少包括相对于光学传播方向（X）的基本垂直的表面。在基板上形成保护层，以覆盖平行于（X，Z）面和至少大致垂直的表面的所述基板的外表面的部分。然后通过使用具有第二掩模孔（18'）的第二掩模掩模通过湿蚀刻来蚀刻衬底，以保护衬底的不被蚀刻的部分，以便在衬底中形成空腔，该空腔包括具有相对于传播方向（X）。因此，保护层被去除，使得蚀刻的孔和沟槽合并以形成单个空腔。

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