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1. 发明申请

WO2011028037A2 ETCHANT FOR THIN FILM TRANSISTOR-LIQUID CRYSTAL DISPLAY 审中-公开
标题翻译：蚀刻剂用于薄膜晶体管液晶显示器
公开(公告)号：WO2011028037A2
公开(公告)日：2011-03-10
申请号：PCT/KR2010/005960
申请日：2010-09-02
申请人： TECHNO SEMICHEM CO., LTD. , SONG, Yong Sung , RHEE, Tai Hyung
发明人： SONG, Yong Sung , RHEE, Tai Hyung
IPC分类号： C09K13/08
CPC分类号： H01L21/32134 , C23F1/14 , C23F1/44 , H01L29/458 , H01L29/4908
摘要： Provided is an etchant of a metal film including an organic chelating agent with an amino group and a carboxyl group; peroxides; oxidants fluorine compounds; glycols; additives and deionized water. Provided is a composition of an etchant for patterning of a copper film which is a wiring material of a gate electrode and source/drain forming a Thin Film Transistor-Liquid Crystal Display (TFT-LCD). The etchant generates uniform etching and has excellent stability, so it improvesnon-uniform etching generated by high viscosity, which is a disadvantage of the phosphorous etchant, as well as stability of the peroxide etchant. The etchant has a uniform etching property by solving a spot problem due to high viscosity of a high composition of the phosphorous etchant. Bulk etching of a single layer as well as a multi-layer is possible.
摘要翻译：本发明提供包含具有氨基和羧基的有机螯合剂的金属膜的蚀刻剂; 过氧化物; 氧化剂氟化合物; 乙二醇; 添加剂和去离子水。本发明提供一种用于图案化作为形成薄膜晶体管液晶显示器（TFT-LCD）的栅极电极和源极/漏极的布线材料的铜膜的蚀刻剂的组合物。蚀刻剂产生均匀的蚀刻并且具有优异的稳定性，因此它改善了由高粘度产生的非均匀蚀刻，这是磷蚀刻剂的缺点以及过氧化物蚀刻剂的稳定性。蚀刻剂通过解决由于磷蚀刻剂的高组成的高粘度而引起的斑点问题而具有均匀的蚀刻性质。批量蚀刻单层和多层是可能的。

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