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1. 发明申请

WO2010105131A1 PROBE HEAD STRUCTURE FOR PROBE TEST CARDS 审中-公开
标题翻译：用于探针测试卡的探头头结构
公开(公告)号：WO2010105131A1
公开(公告)日：2010-09-16
申请号：PCT/US2010/027098
申请日：2010-03-12
申请人： SV PROBE PTE LTD. , DANG, Son, N. , BACK, Gerald, W. , KAZMI, Rehan
发明人： DANG, Son, N. , BACK, Gerald, W. , KAZMI, Rehan
IPC分类号： G01R1/067 , G01R1/073
CPC分类号： G01R1/0675 , G01R1/07357
摘要： A probe head assembly for testing a device under test includes a plurality of test probes and a probe head structure. The probe head structure includes a guide plate and a template and supports a plurality of test probes that each includes a tip portion with a tip end for making electrical contact with a device under test, a curved compliant body portion and a tail portion with a tail end for making electrical contact with the space transformer. Embodiments of the invention include offsetting the position of the tail portions of the test probes with respect to the tip portions of the test probes so that the tip portions of the test probes are biased within the apertures of the guide plate, using hard stop features to help maintain the position of the test probes with respect to the guide plate and probe ramp features to improve scrubbing behavior.
摘要翻译：用于测试待测器件的探头组件包括多个测试探头和探头头结构。探针头结构包括引导板和模板，并且支撑多个测试探针，每个测试探针包括尖端部分，该尖端部分具有用于与被测器件电接触的尖端，弯曲的柔顺体部分和具有尾部的尾部结束与空间变压器的电气接触。本发明的实施例包括相对于测试探针的末端部分抵消测试探针的尾部的位置，使得测试探针的末端部分被偏压在导板的孔内，使用硬停止特征有助于保持测试探针相对于导板和探针斜坡特征的位置，以改善擦洗行为。

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