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1. 发明申请

WO1995007543A1 FABRICATION AND STRUCTURE OF ELECTRON-EMITTING DEVICES HAVING HIGH EMITTER PACKING DENSITY 审中-公开
标题翻译：具有高发射体包装密度的电子发射装置的制造和结构
公开(公告)号：WO1995007543A1
公开(公告)日：1995-03-16
申请号：PCT/US1994009762
申请日：1994-09-08
申请人： SILICON VIDEO CORPORATION
发明人： SILICON VIDEO CORPORATION , MACAULAY, John, M. , SPINDT, Christopher, J. , SEARSON, Peter, C. , DUBOC, Robert, M., Jr.
IPC分类号： H01J09/02
CPC分类号： B82Y10/00 , H01J1/3042 , H01J3/022 , H01J9/025 , H01J2201/30403 , H01J2201/30457 , H01J2201/319
摘要： Electron-emissive elements in area electron emitters suitable for flat-panel displays are fabricated at high packing density. The electron-emissive elements have various shapes such as filaments (30A, 30B, or 30/88D1), cones (1181 or 142D), and cone-topped pedestals (92/1021). A typical emitter contains a substrate (20) that provides structural support. A patterned lower non-insulating region (22) formed with parallel lines is provided over insulating material of the substrate. Electron-emissive filaments (30A, 30B, or 30/88D1) are formed in pores (281) extending through an insulating layer (24) furnished over the lower non-insulating region. A patterned non-insulating gate layer (34B, 40B, or 46B) is typically provided over the insulating layer to form a gated device. Charged-particle tracks (261 or 50A1/50B1) are preferably employed to define locations for electron-emissive features. Usage of charged-particle tracks enables the electron-emissive features to be quite small and spaced closely together.
摘要翻译：适用于平板显示器的面积电子发射体中的电子发射元件以高填充密度制造。电子发射元件具有各种形状，例如细丝（30A，30B或30 / 88D1），锥体（1181或142D）和圆锥顶座（92/1021）。典型的发射器包含提供结构支撑的衬底（20）。在基板的绝缘材料上设置形成有平行线的图案化的下部非绝缘区域（22）。电子发射丝（30A，30B或30 / 88D1）形成在延伸穿过下部非绝缘区域上的绝缘层（24）的孔（281）中。通常在绝缘层上设置图案化非绝缘栅极层（34B，40B或46B）以形成门控器件。电荷粒子轨迹（261或50A1 / 50B1）优选用于限定电子发射特征的位置。带电粒子轨迹的使用使得电子发射特征相当小并且间隔得很紧密。

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