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    • 6. 发明申请
    • MEMS ACTUATOR DEVICE
    • MEMS致动器装置
    • WO2012067852A1
    • 2012-05-24
    • PCT/US2011/059414
    • 2011-11-04
    • DIGITALOPTICS CORPORATION MEMSGUTIERREZ, Roman C.CALVET, Robert J.
    • GUTIERREZ, Roman C.CALVET, Robert J.
    • H02N1/00G02B26/08
    • H02N1/002G02B7/102G02B13/0085
    • A method for making an actuator device includes providing a wafer comprising a layer of an electrically conductive material and forming a plurality of rotationally symmetrical dies (400) in the electrically conductive material, each die (400) including a plurality of radial tabs (404) and complementarily sized radial recesses (504) arranged in alternating fashion and at equal angular increments around the circumfery of the die (400). To maximize the use of available wafer space, the dies (400) are arranged in a pattern on the wafer in which each die (400) is rotated relative to adjacent dies (400) through an angle of 360 degrees divided by twice the number of tabs (404) or recesses (504) on the die and, except for dies (400) located at an outer periphery of the wafer, each die (400) is disposed in edge-to-edge near abutment with an adjacent die (400) and each tab (404) of each die (400) is nested within a complementary recess (504) of an adjacent die (400).
    • 一种用于制造致动器装置的方法包括:提供包括导电材料层的晶片并在导电材料中形成多个旋转对称的模具(400),每个模具(400)包括多个径向突片(404) 以及互补尺寸的径向凹槽(504),其以交替的方式并且围绕模具(400)的圆周以相等的角度增量布置。 为了最大限度地利用可用的晶片空间,模具(400)以晶片的形式布置在晶片上,其中每个模具(400)相对于相邻的模具(400)以360度的角度相对于相对的模具 芯片上的突出部(404)或凹部(504),并且除了位于晶片的外周的模具(400)之外,每个模具(400)与邻近的模具(400)邻接地邻接设置 )并且每个管芯(400)的每个突片(404)嵌套在相邻管芯(400)的互补凹部(504)内。