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    • 2. 发明申请
    • METHOD FOR MACHINING MATERIAL USING LASER RADIATION AND APPARATUS FOR CARRYING OUT THE METHOD
    • 用于材料加工的方法采用激光辐射和设备用于实施该方法
    • WO2008145305A4
    • 2009-01-29
    • PCT/EP2008004127
    • 2008-05-23
    • FRAUNHOFER GES FORSCHUNGPETRING DIRKSCHNEIDER FRANKSCHULZ WOLFGANGNIESSEN MARKUS
    • PETRING DIRKSCHNEIDER FRANKSCHULZ WOLFGANGNIESSEN MARKUS
    • B23K26/06
    • B23K26/0617B23K26/0604B23K26/382B23K26/384B23K26/389
    • The invention relates to a method for machining material using laser radiation, in which the unfocused laser radiation is focused through a focusing optics to a smaller beam cross section, the optical axis of the focused laser radiation, referred to as beam axis, is directed at the material surface, the beam waist, which results from the focusing operation, of the focused laser radiation is held in the region of the interface, which forms, of laser radiation and material, the laser radiation is partially absorbed on the interface such that due to induced material ablation or induced material displacement the interface and thus also the laser radiation penetrate into the material, wherein the spacing of the beam waist from the upper or lower side of the interface in the axial direction corresponds at most to triple the value of the penetration depth of the interface into the material, which is characterized in that the focusing operation is effected such that components of the laser radiation are made divergent not just in the propagation direction downstream of the beam waist but also in the beam waist and/or also in the propagation direction upstream of the beam waist and are thus directed away from the beam axis, and in that these components and angles of divergence are larger than those of the effects of imaging errors, which are inadvertently produced using standard optics and are tolerated. The invention furthermore relates to an apparatus for carrying out the method.
    • 本发明涉及一种方法,用于与激光辐射,其中,所述未聚焦的激光辐射由聚焦光学器件聚焦到一个较小的光束横截面加工材料时,聚焦的激光辐射的光轴,被称为光束轴被引导到材料表面,其从所述聚焦的聚焦光束束腰导致 激光辐射保持在激光束和材料的相互作用的形成区域的区域中,激光辐射被吸收在交互表面的一部分,使得交互表面贯通诱导材料去除或材料的诱导位移并因此也在材料中的激光辐射,的束腰其中,所述距离 在轴向方向上的相互作用表面的顶部或底部表面至多对应于所述相互作用表面的该材料中的穿透深度,其特征在于的三倍的值 即执行聚焦,使得激光辐射的部分不仅在束腰的传播方向,而且在光束腰和/或也在束腰前的传播方向发散,从而引导从光束轴远离的,并且这些部件和发散角大 比的像差的影响与标准的光学器件被无意产生和被接受。 此外,本发明涉及一种装置,用于执行该方法。