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1. 发明申请

WO2007037992A2 MICROELECTROMECHANICAL (MEM) FLUID HEALTH SENSING DEVICE AND FABRICATION METHOD 审中-公开
标题翻译：微电子医疗（MEM）流体卫生感测装置及制造方法
公开(公告)号：WO2007037992A2
公开(公告)日：2007-04-05
申请号：PCT/US2006035780
申请日：2006-09-12
申请人： ROCKWELL SCIENT LICENSING LLC , DE NATALE JEFFREY F , BORWICK ROBERT L III , STUPAR PHILIP A , KENDIG MARTIN W
发明人： DE NATALE JEFFREY F , BORWICK ROBERT L III , STUPAR PHILIP A , KENDIG MARTIN W
IPC分类号： G01N11/00
CPC分类号： G01N33/2888 , G01N11/16
摘要： A microelectromechanical (MEM) fluid health sensing device comprises a viscosity sensor which provides an output that varies with the viscosity of a fluid in which it is immersed, and at least one other sensor which provides an output that varies with another predetermined parameter of the fluid. The viscosity sensor is preferably a MEM device fabricated by means of a "deep etch" process. The sensors are preferably integrated together on a common substrate, though they might also be fabricated separately and packaged together to form a hybrid device. A data processing means may be included which receives the sensor outputs and provides one or more outputs indicative of the health of the fluid. Sensor types which may be part of the present device include, for example, a temperature sensor, a MEM electrochemical sensor, a MEM accelerometer, a MEM contact switch lubricity sensor, and/or an inductive metallic wear sensor.
摘要翻译：微机电（MEM）流体健康感测装置包括粘度传感器，该粘度传感器提供随着浸入其中的流体的粘度而变化的输出，以及提供随流体的另一预定参数而变化的输出的至少一个其它传感器。粘度传感器优选是通过“深蚀刻”工艺制造的MEM器件。传感器优选地集成在公共基板上，尽管它们也可以单独制造并且封装在一起以形成混合装置。可以包括接收传感器输出并提供指示流体健康的一个或多个输出的数据处理装置。可以是本装置一部分的传感器类型包括例如温度传感器，MEM电化学传感器，MEM加速度计，MEM接触开关润滑性传感器和/或感应金属磨损传感器。

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