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    • 8. 发明申请
    • METHOD AND APPARATUS FOR PRECURSOR DELIVERY SYSTEM FOR IRRADIATION BEAM INSTRUMENTS
    • 用于辐照光束仪器的前驱器传送系统的方法和装置
    • WO2009114112A2
    • 2009-09-17
    • PCT/US2009/001480
    • 2009-03-06
    • OMNIPROBE, INC.KRUGER, RockySMITH, AaronMOORE, Thomas
    • KRUGER, RockySMITH, AaronMOORE, Thomas
    • C23C16/455C23C16/48
    • C23C16/4481C23C16/45561C23C16/48C23C16/52C23C16/54
    • A precursor delivery system for an irradiation beam instrument having a vacuum chamber includes an injection tube (340) for injecting gasses into the vacuum chamber of the instrument and a main gas line (290) having an inlet (295) and an outlet 335). The outlet (335)is connected to the injection tube, (340) and the inlet (295) is connected to a sequential pair of valves (120, 125) connected to a carrier gas source (150). A crucible (190) for holding precursor material is selectively connected to the main gas line (290) at a location between the pair of valves (120, 125) and the injection tube (340). The source (150) of carrier gas may be selectively connected to the inlet (295) by sequential operation of the pair of carrier gas valves (120, 125), so that pulses of carrier gas assist the flow of precursor material to the injection tube (340). Rapid purging of the system between precursors is enabled by a valve (110) selectively connecting the main line (290) to an envelope (300) in communication with the instrument vacuum. Methods of CVD and etching using the system are also disclosed.
    • 用于具有真空室的照射束仪器的前体输送系统包括用于将气体注入仪器的真空室中的注入管(340)和具有入口(295)和出口335的主气体管线(290)。 出口(335)连接到注射管(340),并且入口(295)连接到连接到载气源(150)的顺序一对阀(120,125)。 用于保持前体材料的坩埚(190)在一对阀(120,125)和注射管(340)之间的位置处选择性地连接到主气体管线(290)。 载气的源(150)可以通过一对载气阀(120,125)的顺序操作选择性地连接到入口(295),使得载气的脉冲帮助前体材料流到注射管 (340)。 通过选择性地将主线(290)连接到与仪器真空连通的封套(300)的阀门(110)能够快速清洗前体之间的系统。 还公开了使用该系统的CVD和蚀刻的方法。