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1. 发明申请

WO1997045522A1 PROCESS FOR THE RECOVERY OF CYCLIC HYDROFLUOROCARBON AND PROCESS FOR CLEANING ARTICLES 审中-公开
标题翻译：循环氢氟烷的回收方法及清洗方法
公开(公告)号：WO1997045522A1
公开(公告)日：1997-12-04
申请号：PCT/JP1997001808
申请日：1997-05-28
申请人： NIPPON ZEON CO., LTD. , YAMADA, Toshiro , SUGAWARA, Mitsuru , GOTO, Kuniaki
发明人： NIPPON ZEON CO., LTD.
IPC分类号： C11D07/50
CPC分类号： D06L1/10 , B01D17/0211 , B01D17/0214 , B01D17/042 , B01D17/048 , C23G5/02
摘要： A homogeneous liquid mixture comprising a hydrocarbon and a cyclic hydrofluorocarbon is separated by cooling into a hydrocarbon layer and a cyclic hydrofluorocarbon layer, and only the latter is recovered and used as at least part of the cyclic hydrofluorocarbon to be used in rinsing and/or vapor drying.
摘要翻译：通过冷却将包含烃和环状氢氟烃的均匀的液体混合物通过冷却分离成烃层和环状氢氟碳化合物层，并且只回收碳氢化合物层，并且将其用作用于冲洗和/或蒸汽的环状氢氟烃的至少一部分烘干。

2. 发明申请

WO1997045521A1 PROCESS FOR CLEANING ARTICLES 审中-公开
标题翻译：清洁文章的过程
公开(公告)号：WO1997045521A1
公开(公告)日：1997-12-04
申请号：PCT/JP1997001807
申请日：1997-05-28
申请人： NIPPON ZEON CO., LTD. , YAMADA, Toshiro , SUGAWARA, Mitsuru , GOTO, Kuniaki
发明人： NIPPON ZEON CO., LTD.
IPC分类号： C11D07/50
CPC分类号： B08B3/08 , C11D7/24 , C11D7/28 , C11D7/5018 , C11D7/5027 , C11D11/0011 , C11D11/0064 , C11D11/0076 , C23G5/02
摘要： A process for cleaning which comprises (1) cleaning articles to be cleaned with a cleaning solvent comprising a hydrocarbon as the main component, (2) rinsing the resulting article having the cleaning solvent adherent thereto with a rinsing solvent comprising a hydrofluorocarbon as the main component, and (3) separating the discharge from the rinsing step comprising the rinsing solvent and the hydrocarbon as contaminant into two phases, characterized by using as the rinsing solvent a cyclic hydrofluorocarbon wherein the number of fluorine atoms is larger than that of hydrogen atoms.
摘要翻译：一种清洁方法，其包括（1）用包含烃作为主要成分的清洗溶剂清洗待清洗物品，（2）用包含氢氟烃作为主要成分的冲洗溶剂漂洗所得到的具有附着于其上的清洗溶剂的制品，和（3）将包括漂洗溶剂和作为污染物的烃的漂洗步骤的排出物分离成两相，其特征在于使用氟原子数大于氢原子的环状氢氟烃作为漂洗溶剂。

3. 发明申请

WO1998019331A1 GAS COMPOSITION FOR DRY ETCHING AND PROCESS OF DRY ETCHING 审中-公开
标题翻译：用于干燥蚀刻的气体组合物和干蚀刻的过程
公开(公告)号：WO1998019331A1
公开(公告)日：1998-05-07
申请号：PCT/JP1997003966
申请日：1997-10-30
申请人： JAPAN as represented by DIRECTOR GENERAL OF THE AGENCY OF INDUSTRIAL SCIENCE AND TECHNOLOGY , THE MECHANICAL SOCIAL SYSTEMS FOUNDATION , ELECTRONIC INDUSTRIES ASSOCIATION OF JAPAN , NIPPON ZEON CO., LTD. , SEKIYA, Akira , YAMADA, Toshiro , GOTO, Kuniaki , TAKAGAKI, Tetsuya
发明人： JAPAN as represented by DIRECTOR GENERAL OF THE AGENCY OF INDUSTRIAL SCIENCE AND TECHNOLOGY , THE MECHANICAL SOCIAL SYSTEMS FOUNDATION , ELECTRONIC INDUSTRIES ASSOCIATION OF JAPAN , NIPPON ZEON CO., LTD.
IPC分类号： H01L21/302
CPC分类号： H01L21/3065 , H01L21/31116 , H01L21/32136
摘要： A gas composition for dry etching which comprises a perfluorocycloolefin and 1 to 40 mole % (based on the perfluorocycloolefin) of at least one oxygenic component selected from among oxygen gas and gaseous oxygenic compounds, the perfluorocycloolefin being preferably one having 3 to 8 carbon atoms, still preferably 4 to 6 carbon atoms.
摘要翻译：一种用于干蚀刻的气体组合物，其包含全氟环烯烃和1至40摩尔％（基于全氟环烯烃）的至少一种选自氧气和气态含氧化合物的氧组分，全氟环烃优选为具有3至8个碳原子的一种，更优选为4至6个碳原子。

4. 发明申请

WO1997035919A1 LUBRICATIVE POLYMER CONTAINING LIQUID AND METHOD OF FORMING FILM OF LUBRICATIVE POLYMER 审中-公开
标题翻译：包含液体的润滑聚合物和形成润滑聚合物膜的方法
公开(公告)号：WO1997035919A1
公开(公告)日：1997-10-02
申请号：PCT/JP1997000946
申请日：1997-03-21
申请人： NIPPON ZEON CO., LTD. , YAMADA, Toshiro , GOTO, Kuniaki , OHTSUKI, Noriyasu
发明人： NIPPON ZEON CO., LTD.
IPC分类号： C08L27/12
CPC分类号： C09D171/02 , B41J2/16 , B41J2/1623 , B41J2/1631 , B41J2/164 , B41J2/1642 , B41J2/1643 , B41J2/1645 , B41J2/1646 , C08G65/005 , C09D127/12 , G03G5/005 , G03G21/0017 , G11B5/71 , G11B5/725
摘要： A lubricative polymer containing liquid comprising a lubricative polymer, preferably a fluorine based polymer, having a coating forming capacity and solved or dispersed in a liquid medium, which has a cyclic fluorine hydrocarbon as its main component. Film of a lubricative polymer having a good performance is formed by spreading the lubricative polymer containing liquid on surfaces of, for example, a magnetic recording hard disk, ink jet recording head, a cleaning blade of an image forming device and the like, and removing the liquid medium.
摘要翻译：一种含有液体的润滑聚合物，其包含具有涂层形成能力并溶解或分散在具有环状氟烃作为其主要成分的液体介质中的润滑聚合物，优选氟基聚合物。具有良好性能的润滑聚合物的膜通过在含有例如磁记录硬盘，喷墨记录头，图像形成装置的清洁刮板等的表面上铺展含润滑聚合物的液体而形成，并除去液体介质。

5. 发明申请

WO1997043233A1 PROCESS FOR THE PREPARATION OF FLUORINATED OLEFIN 审中-公开
标题翻译：制备氟化烯烃的方法
公开(公告)号：WO1997043233A1
公开(公告)日：1997-11-20
申请号：PCT/JP1997001516
申请日：1997-05-02
申请人： JAPAN as represented by DIRECTOR GENERAL OF THE AGENCY OF INDUSTRIAL SCIENCE AND TECHNOLOGY , NIPPON ZEON CO., LTD. , SEKIYA, Akira , YAMADA, Toshiro , SUGAWARA, Mitsuru
发明人： JAPAN as represented by DIRECTOR GENERAL OF THE AGENCY OF INDUSTRIAL SCIENCE AND TECHNOLOGY , NIPPON ZEON CO., LTD.
IPC分类号： C07C21/18
CPC分类号： C07C23/08 , C07C17/206 , C07C17/208 , C07C17/383
摘要： A process for preparing a fluorinated olefin having a fluorine atom bonded to either of the carbon atoms of the carbon-carbon double bond by reacting an alkali metal fluoride with a halogenated olefin which has in the molecule at least one carbon-carbon double bond having a chlorine atom bonded to either of the carbon atoms thereof and none of the carbon atoms of the carbon-carbon single bonds of which has non-fluorine halogen, characterized in that the above reaction is conducted in the presence of an organic halide having at least one non-fluorine halogen atom bonded to any of the carbon atoms of the carbon-carbon single bonds.
摘要翻译：一种通过使碱金属氟化物与卤化烯烃反应而制备具有与碳 - 碳双键的碳原子键合的氟原子的氟化烯烃的方法，所述卤化烯烃在分子中具有至少一个碳 - 碳双键，所述碳 - 碳双键具有氯原子键合到其任一碳原子上，碳 - 碳单键的碳原子都不具有非氟卤素，其特征在于上述反应在有至少一种有机卤化物存在下进行与碳 - 碳单键的碳原子键合的非氟卤素原子。

6. 发明申请

WO1998019332A1 DRY ETCHING METHOD 审中-公开
标题翻译：干蚀刻方法
公开(公告)号：WO1998019332A1
公开(公告)日：1998-05-07
申请号：PCT/JP1997003968
申请日：1997-10-30
申请人： JAPAN as represented by DIRECTOR GENERAL OF THE AGENCY OF INDUSTRIAL SCIENCE AND TECHNOLOGY , THE MECHANICAL SOCIAL SYSTEMS FOUNDATION , ELECTRONIC INDUSTRIES ASSOCIATION OF JAPAN , NIPPON ZEON CO., LTD. , SEKIYA, Akira , YAMADA, Toshiro , GOTO, Kuniaki , TAKAGAKI, Tetsuya
发明人： JAPAN as represented by DIRECTOR GENERAL OF THE AGENCY OF INDUSTRIAL SCIENCE AND TECHNOLOGY , THE MECHANICAL SOCIAL SYSTEMS FOUNDATION , ELECTRONIC INDUSTRIES ASSOCIATION OF JAPAN , NIPPON ZEON CO., LTD.
IPC分类号： H01L21/302
CPC分类号： H01L21/30604 , H01L21/31116
摘要： A dry-etching gas comprising a perfluorocycloolefin is used to generate a plasma having a density as high as 10 particles/cm or above to dry-etch a substrate with the plasma. The perfluorocycloolefin has preferably 3 to 8, especially 4 to 6 carbon atoms.
摘要翻译：使用包含全氟环烷烃的干蚀刻气体来产生密度高达10×10 3 / cm 3或更高的等离子体，以便用等离子体对基片进行干蚀刻。全氟环烯烃优选为3〜8个，特别是4〜6个碳原子。

7. 发明申请

WO1999050209A1 METHOD FOR PRODUCING FLUORINATED SATURATED HYDROCARBON 审中-公开
标题翻译：生产氟化饱和烃的方法
公开(公告)号：WO1999050209A1
公开(公告)日：1999-10-07
申请号：PCT/JP1999001468
申请日：1999-03-24
申请人： NIPPON ZEON CO., LTD. , YAMADA, Toshiro , SUGIMOTO, Tatsuya , SUGAWARA, Mitsuru
发明人： NIPPON ZEON CO., LTD.
IPC分类号： C07C23/08
CPC分类号： C07C19/08
摘要： A fluorinated saturated hydrocarbon having a -CH2-CHF-bond is produced (a) by providing a mixture of a fluorinated saturated hydrocarbon having a -CHF-CHF-bond and a fluorinated saturated having a -CH2-CHF-bond as a feed stock, selectively dehydrofluorinating the fluorinated saturated hydrocarbon having a -CHF-CHF-bond in the stock and removing a fluorinated unsaturated hydrocarbon having a -CHF=CF-bond from the resulting reaction mixture by distillation, or, (b) by providing, as the above-mentioned stock, a mixture of the fluorinated hydrocarbons which have the same structure with respect to the moieties other than -CHF-CHF- and -CH2-CHF-bonds, carrying out a dehydrofluorination in a way similar to (a), and hydrogenating the resulting reaction product without separating a fluorinating saturates hydrocarbon having a -CH2-CHF-bond remaining unreacted in the reaction product.
摘要翻译：通过提供具有-CHF-CHF键的氟化饱和烃和具有-CH 2 -CHF-键的氟化饱和的混合物作为原料制备具有-CH 2 -CHF-键的氟化饱和烃作为原料选择性地使原料中具有-CHF-CHF键的氟化饱和烃选择性脱氟化氢，并通过蒸馏从所得反应混合物中除去具有-CHF = CF-键的氟化不饱和烃，或者（b）通过提供作为上述原料，相对于除了-CHF-CHF-和-CH2-CHF-键之外的部分具有相同结构的氟化烃的混合物，以类似于（a）的方式进行脱氟化氢，以及氢化所得反应产物而不分离反应产物中残留未反应的-CH 2 -CHF-键的氟化饱和烃。

8. 发明申请

WO1999057755A1 SELECTIVE DRY ETCHING METHOD 审中-公开
标题翻译：选择性干蚀刻方法
公开(公告)号：WO1999057755A1
公开(公告)日：1999-11-11
申请号：PCT/JP1999002025
申请日：1999-04-16
申请人： NIPPON ZEON CO., LTD. , GOTO, Kuniaki , TANAKA, Kimiaki , YAMADA, Toshiro
发明人： NIPPON ZEON CO., LTD.
IPC分类号： H01L21/3065
CPC分类号： H01L21/31116
摘要： A method for dry etching a layer of a silicon oxide-based material selectively on a substrate having a layer of a silicon nitride-based material formed thereon and a layer of a silicon oxide-based material formed on the silicon nitride-based material, which comprises employing a perfluorocycloolefin having a content of the impurities containing chlorine of 1,000 ppm or less as an etching gas. It is preferred that the perfluorocycloolefin has three to eight carbon atoms and more preferred four to six carbon atoms, and octacyclopentene is most preferred.
摘要翻译：一种用于在其上形成有氮化硅基材料的层的基板上选择性地干蚀刻氧化硅基材料层的方法和形成在氮化硅基材料上的氧化硅基材料层，包括使用具有1,000ppm以下的氯的杂质含量的全氟环烷烃作为蚀刻气体。优选全氟环烷烃具有3至8个碳原子，更优选4至6个碳原子，并且最优选八环戊烯。

9. 发明申请

WO1992003397A1 PROCESS FOR PRODUCING TRIFLUORINATED HYDROCARBON COMPOUND 审中-公开
标题翻译：生产三氟化碳化合物的方法
公开(公告)号：WO1992003397A1
公开(公告)日：1992-03-05
申请号：PCT/JP1991001140
申请日：1991-08-28
申请人： JAPAN as represented by DIRECTOR GENERAL OF ... , NIPPON ZEON CO., LTD. , SEKIYA, Akira , KUROSAWA, Shigeru , YAMADA, Toshiro , GOTO, Kuniaki
发明人： JAPAN as represented by DIRECTOR GENERAL OF ... , NIPPON ZEON CO., LTD.
IPC分类号： C07C19/08
CPC分类号： C07C17/10 , C07C19/10 , C07C19/08
摘要： A difluorinated hydrocarbon compound represented by general formula (1) is reacted with cobalt trifluoride to give a trifluorinated hydrocarbon compound represented by general formula (2), wherein R represents lower alkyl and R' and R'' represent each hydrogen, halogen or lower alkyl which may be halogenated. The reaction proceeds under mild conditions to yield the objective compound with high selectivity.

10. 发明申请

WO1996000707A1 PROCESS FOR PRODUCING FLUORINATED ALKENE DERIVATIVE AND FLUORINATED ALKANE DERIVATIVE 审中-公开
标题翻译：生产氟化烷烃衍生物和氟化烷烃衍生物的方法
公开(公告)号：WO1996000707A1
公开(公告)日：1996-01-11
申请号：PCT/JP1995001313
申请日：1995-06-30
申请人： JAPAN AS REPRESENTED BY DIRECTOR GENERAL OF THE AGENCY OF INDUSTRIAL SCIENCE AND TECHNOLOGY , NIPPON ZEON CO., LTD. , SEKIYA, Akira , YAMADA, Toshiro , WATANABE, Kazunori
发明人： JAPAN AS REPRESENTED BY DIRECTOR GENERAL OF THE AGENCY OF INDUSTRIAL SCIENCE AND TECHNOLOGY , NIPPON ZEON CO., LTD.
IPC分类号： C07C17/04
CPC分类号： C07C23/08 , C07C17/00 , C07C17/04 , C07C17/206 , C07C17/208 , C07C17/21 , C07C17/23 , C07C17/354 , C07C21/18
摘要： A process for producing a fluorinated vic-dichloroalkene derivative and a fluorinated alkane derivative represented by the respective general formulae from an inespensive starting material: R -CC1=CC1-R , R -CR R -CR R -R , (wherein R and R represent each independently perfluoroalkyl, or are combined together to represent perfluoroalkylene; and R , R , R and R represent each independently hydrogen or fluorine). Specifically, 1,2-dichlorohexafluorocyclopentene is produced by the reaction of hexachlorocyclopentadiene in the presence of an antimony catalyst first with a chlorine gas and then with hydrogen fluoride, and a fluorinated alkane derivative is produced either by hydrogenating the cyclopentene derivative obtained above or by replacing the chlorine atoms of the above derivative by fluorine atoms by using a fluorinating agent, followed by hydrogenation.
摘要翻译： R 1 -CCl = CC1-R 2，R 1 -CR 3，其中R 1，R 2，R 3，R 3，R 3，R 3， R 4 -CR 5 R 6 -R 2（其中R 1和R 2各自独立地表示全氟烷基，或者组合在一起代表全氟亚烷基; R 3，R R 5，R 5和R 6各自独立地表示氢或氟）。具体地说，1,2-二氯六氟环戊烯通过六氯环戊二烯在锑催化剂的存在下首先与氯气反应然后与氟化氢反应来制备，通过氢化上面得到的环戊烯衍生物或通过将上述衍生物的氯原子用氟原子通过氟化剂，然后氢化。

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