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    • 3. 发明申请
    • CAPACITIVE AREA-CHANGED MEMS GYROSCOPE WITH ADJUSTABLE RESONANCE FREQUENCIES
    • 具有可调谐共振频率的电容式区域式MEMS陀螺仪
    • WO2009057990A2
    • 2009-05-07
    • PCT/MY2008/000124
    • 2008-10-22
    • MIMOS BERHADTAMSIR, Agus, SantosoMANUT, AzrifSULAIMAN, Suraya
    • TAMSIR, Agus, SantosoMANUT, AzrifSULAIMAN, Suraya
    • G01C19/56B81B7/02
    • G01C19/5656B81B3/0037B81B2201/0242
    • There is disclosed a surface micromachined (MEMS) gyroscope device where the resonance frequencies are capable of being adjusted and tuned for obtaining maximum response gain for higher sensitivity. The MEMS gyroscope comprises of a substrate (1), a proof-mass (2), a capacitive area-changed plate (3), a driving mode electrode (4) and a sensing mode electrode (5). The proof -mass (2) is structured as a cross-shaped body that includes the sensing mode and driving mode electrodes (4, 5) where the proof -mass is adapted to oscillate back and forth laterally over the capacitive area-changed plate (3) defining an area-changed capacitive type MEMS gyroscope. The driving and sensing mode electrodes (4,5) are shaped as a symmetrical branch-finger structure. The proofmass is connected to the substrate (1) through a spring (6) and the branch-finger structure is provided having two different gap side-by-side and narrow-wide narrow gap series configuration, whereby, the spring is configured as a circular-shaped, rectangular-shaped or variations of the same. The spring constant {K X , K y ) is controllable and adjustable through the application of voltage on the branch finger acting as actuator and pseudo spring thus providing tuned resonant frequency for higher sensitivity.
    • 公开了一种表面微加工(MEMS)陀螺仪装置,其中谐振频率能够被调节和调谐以获得用于较高灵敏度的最大响应增益。 MEMS陀螺仪由基板(1),质量块(2),电容面积变化板(3),驱动模式电极(4)和感测模式电极(5)组成。 质量块(2)被构造为包括感测模式和驱动模式电极(4,5)的十字形体,其中质量块适于在电容面积改变的板上横向来回振荡( 3)定义一个面积改变的电容式MEMS陀螺仪。 驱动和感测模式电极(4,5)被成形为对称的分支结构。 所述质量块通过弹簧(6)连接到所述基板(1),并且所述分支指状结构设置为具有两个不同的间隙并排和窄宽窄间隙串联配置,由此所述弹簧被配置为 圆形,矩形或其变型。 通过施加作为致动器和伪弹簧的分支手指上的电压,弹簧常数{K X <,
    • 4. 发明申请
    • VIBRATORY SENSOR
    • 振动传感器
    • WO2009084942A2
    • 2009-07-09
    • PCT/MY2008/000199
    • 2008-12-30
    • MIMOS BERHADTAMSIR, Agus, SantosoSULAIMAN, SurayaMUHAMAD ALIAS, DzuzlindahMANUT, AzrifZAKARIA, Azlan
    • TAMSIR, Agus, SantosoSULAIMAN, SurayaMUHAMAD ALIAS, DzuzlindahMANUT, AzrifZAKARIA, Azlan
    • H01L27/04G01N27/12
    • G01N27/226
    • A capacitor comprises a dielectric base layer (4a) defined by top, first and side surfaces; a plurality of first driven electrode (15) having tips and edges deposited on the top surface of the dielectric base layer (4a) that each are spaced apart at the edges by a predetermined gap; a plurality of first sensing electrode (16) having tips and edges that each of the first sensing electrode (16) is deposited at each of the predetermined gap in between two first driven electrodes (15) with a predetermined distance in between the first sensing (16) and first driven electrodes (15); a plurality pair of protrusion (20) extends upward from the top surface of the dielectric base layer (4a) at the tips of the first driven electrodes (15) and the first sensing electrodes (16); a second driven electrode (10) or a second sensing electrode (11) are positioned overhead of each first driven electrode (15) and first sensing electrode (16) respectively by anchoring onto the corresponding pair of protrusions (20) with a void left between each second and first electrodes; whereby the second driven (10) and second sensing (11) electrodes vibrate up and down by applying a bias voltage onto the first driven (15) and first sensing (16) electrodes thus able to manipulate penetration depth of quasi-static electric field lines produced from the second driven (10) and second sensing electrodes (11) into a material under test.
    • 电容器包括由顶部,第一和侧表面限定的电介质基层(4a) 多个第一驱动电极(15),所述多个第一驱动电极(15)具有沉积在所述介电基层(4a)的顶表面上的顶端和边缘,所述顶端和边缘均在所述边缘处间隔开预定的间隙; 具有顶端和边缘的多个第一感测电极(16),每个第一感测电极(16)在两个第一驱动电极(15)之间的预定间隙中的每一个处沉积,在第一感测电极 16)和第一驱动电极(15); 多个成对的突起(20)在第一驱动电极(15)和第一感测电极(16)的末端处从电介质基底层(4a)的顶表面向上延伸; 通过将锚定在相应的一对突起(20)上的方式将第二驱动电极(10)或第二感测电极(11)分别定位在每个第一驱动电极(15)和第一感测电极(16) 每个第二和第一电极; 由此第二驱动电极(10)和第二感测电极(11)通过向第一驱动电极(15)和第一感测电极(16)施加偏置电压而上下振动,从而能够操纵准静态电场线 (10)和第二传感电极(11)产生的被测材料。
    • 6. 发明申请
    • AN ENERGY HARVESTER
    • 能量收割机
    • WO2010033012A2
    • 2010-03-25
    • PCT/MY2009/000142
    • 2009-09-10
    • MIMOS BERHADMUKTER-UZ-ZAMAN, A., S., M.OTHMAN, MasuriBHUYAN, Mohammad, ShahariaTAMSIR, Agus, SantosoSULAIMAN, Suraya
    • MUKTER-UZ-ZAMAN, A., S., M.OTHMAN, MasuriBHUYAN, Mohammad, ShahariaTAMSIR, Agus, SantosoSULAIMAN, Suraya
    • H02N2/00H02N2/18
    • H02N2/186
    • An energy harvester (100) comprising a base (110); one or more first resilient means (120) mounted on the base (110); a hollow chamber (130) having a mounting point (131) pivotally attached to the first resilient means (120) in static equilibrium in such a way that centre of mass of the hollow chamber (130) is aligned with the first resilient means (120) at the vertical axis; a hollow member (140) enclosed within the hollow chamber (130) being attached to one or more second resilient means (150) extending from the mounting point (131) in static equilibrium that centre of mass of the hollow member (140) is aligned with the second resilient means (150) at the vertical axis; a plurality of piezoelectric material-built cantilevers (160) mounted on the hollow member (140) and spaced apart from one another in a predetermined gap at the vertical planar that the piezoelectric material-built cantilevers (160) are varied in length and/or centre of mass; a primary storage (170) associated with the hollow chamber (130), the hollow member (140) and the plurality of piezoelectric material- built cantilevers (160) through an integrated circuit for storing harvested energy; wherein the energy is harvested through vibration of the plurality of piezoelectric material-built cantilevers (160) at its approximately resonant frequency, reciprocation of the hollow chamber (130) and the hollow member (140) upon applying kinetic force.
    • 一种能量收集器(100),包括基座(110); 安装在基座(110)上的一个或多个第一弹性装置(120); 具有安装点(131)的空心腔(130),其以静态平衡方式枢转地附接到第一弹性装置(120),使得中空室(130)的质心与第一弹性装置(120)对准 )在垂直轴上; 封闭在所述中空室(130)内的空心构件(140)被附接到从所述安装点(131)延伸的一个或多个第二弹性装置(150),所述第二弹性装置以所述中空构件(140)的质心对准的静态平衡 所述第二弹性装置(150)处于垂直轴线; 多个压电材料制造的悬臂(160),其安装在所述中空构件(140)上并且在垂直平面处以预定间隙彼此间隔开,所述压电材料制造的悬臂(160)的长度和/或 质量中心 通过用于存储收获的能量的集成电路与中空室(130)相关联的主要存储器(170),中空构件(140)和多个压电材料制造的悬臂(160) 其中通过在其近似谐振频率处的多个压电材料制造的悬臂(160)的振动,通过施加动力来中空室(130)和中空构件(140)的往复运动来收获能量。