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1. 发明申请

WO2002071127A1 A METHOD AND APPARATUS FOR SPATIAL LIGHT MODULATION 审中-公开
标题翻译：一种用于空间光调制的方法和装置
公开(公告)号：WO2002071127A1
公开(公告)日：2002-09-12
申请号：PCT/SE2002/000328
申请日：2002-02-26
申请人： MICRONIC LASER SYSTEMS AB , FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人： LJUNGBLAD, Ulric , DURR, Peter , SANDSTRÖM, Torbjörn
IPC分类号： G02B26/08
CPC分类号： G03F7/70291 , G02B26/0841 , H04N5/7458
摘要： The present invention includes a method to use a phase modulating micromirror array to create an intensity only image that has high image fidelity, good stability through focus and good x-y symmetry. The method uses pixels consisting of at least in tilting mirror element and adjacent pixels tilt in different ways, but they are laid-out in a pattern that creates effective averaging between pixels with different tilt. The pattern is such that even if a single pixel creates a reflecting or scattering pattern that is asymmetric relative to the specular direction every neighborhood consists of pixels that together create symmetry. The invention allows the use of single-mirror pixels instead of multi-element pixels, thereby making manufacturing and design easier and also makes a smaller pixel size possible. Particular aspects of the present invention are described in the claims, specification and drawings.
摘要翻译：本发明包括使用相位调制微镜阵列产生具有高图像保真度，通过对焦具有良好稳定性和良好的x-y对称性的仅强度图像的方法。该方法使用至少在倾斜镜像元件和相邻像素中以不同方式倾斜的像素，但它们以不同倾斜的像素之间产生有效平均的图案布置。该图案使得即使单个像素产生相对于镜面方向不对称的反射或散射图案，每个邻域由一起产生对称性的像素组成。本发明允许使用单镜像而不是多元素像素，从而使制造和设计更容易，并且还使得更小的像素尺寸成为可能。在权利要求书，说明书和附图中描述了本发明的特定方面。

2. 发明申请

WO2002063371A1 A METHOD AND A DEVICE FOR REDUCING HYSTERESIS OR IMPRINTING IN A MOVABLE MICRO-ELEMENT 审中-公开
标题翻译：一种用于减少可移动微型元件中的滞后或凸起的方法和装置
公开(公告)号：WO2002063371A1
公开(公告)日：2002-08-15
申请号：PCT/SE2002/000142
申请日：2002-01-28
申请人： MICRONIC LASER SYSTEMS AB , FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. , LJUNGBLAD, Ulric , LAKNER, Hubert, Karl , DURR, Peter
发明人： LJUNGBLAD, Ulric , LAKNER, Hubert, Karl , DURR, Peter
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： The present invention relates to a movable micro element with reduced imprinting or hysteresis effect arranged spaced apart from a surface comprising at least one electrode. At least one restoring element is connected to said movable micro element. An address electrode is arranged on said surface and capable to electrostatically attract said movable micro element. Said address electrode is addressed to a first potential. Said movable micro element is first set to a second potential defining a non addressed state and at a time period Δt before a predetermined pulsed signal is emitted said movable micro element is switched from said second potential to a third potential defining a addressed state. Said movable micro element is kept in said addresed state for a time period of Δt+Δt'. The invention also relates to a Spatial Light Modulator (SLM), an apparatus for patterning a workpiece and a method of reducing an imprinting or hysteresis effect of a movable micro element.
摘要翻译：本发明涉及与包括至少一个电极的表面间隔开的具有减小的压印或滞后效应的可移动微元件。至少一个恢复元件连接到所述可移动微元件。地址电极布置在所述表面上并且能够静电吸引所述可移动微元件。所述寻址电极被寻址到第一电位。所述可移动微元件首先被设置为限定非寻址状态的第二电位，并且在发射预定脉冲信号之前的时间段Dgr，将所述可移动微元件从所述第二电势切换到限定寻址状态的第三电位。所述可移动微元件保持处于所述附加状态，持续时间为＆Dgr; t +＆Dgr; t'。本发明还涉及空间光调制器（SLM），用于图案化工件的装置和减小可移动微元件的压印或滞后效应的方法。

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