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1. 发明申请

WO2012047284A2 NOVEL PROCESS FOR MEMS SCANNING MIRROR WITH MASS REMOVE FROM MIRROR BACKSIDE 审中-公开
标题翻译：用于MEMS扫描镜的新型工艺，从背面反射大量去除
公开(公告)号：WO2012047284A2
公开(公告)日：2012-04-12
申请号：PCT/US2011/001704
申请日：2011-10-04
申请人： MAGIC TECHNOLOGIES, INC. , ADVANCED NUMICRO SYSTEMS, INC. , CHEN, Jun , MAO, Guomin , ZHONG, Tom , CAO, Wei , FU, Yee-Chung , TORNG, Chyu-Jiuh
发明人： CHEN, Jun , MAO, Guomin , ZHONG, Tom , CAO, Wei , FU, Yee-Chung , TORNG, Chyu-Jiuh
IPC分类号： H01L21/00
CPC分类号： B81B3/0045 , B81B2201/042 , G02B26/0841
摘要： Two methods of fabricating a MEMS scanning mirror having a tunable resonance frequency are described. The resonance frequency of the mirror is set to a particular value by mass removal from the backside of the mirror during fabrication.
摘要翻译：描述制造具有可调共振频率的MEMS扫描反射镜的两种方法。反射镜的共振频率通过在制造期间从反射镜的背面质量去除而被设定为特定的值。

2. 发明申请

WO2006022967A1 MEMS MIRROR WITH AMPLIFICATION OF MIRROR ROTATION ANGLE 审中-公开
标题翻译：具有放大镜的旋转角度的MEMS反射镜
公开(公告)号：WO2006022967A1
公开(公告)日：2006-03-02
申请号：PCT/US2005/019534
申请日：2005-06-02
申请人： ADVANCED NANO SYSTEMS, INC. , FU, Yee-Chung
发明人： FU, Yee-Chung
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： A micro-electro-mechanical system (MEMS) mirror device (100) includes a mirror (104) coupled to a rotating frame (108) by a first torsional hinge (106) along a rotational axis (110). The rotating frame has a body that defines a frame opening (116), and a group of rotational teeth (120; 122) extending from the body. A first bonding pad (117) is located in the frame opening and coupled to the rotating frame by a second torsional hinge (118; 119) along the rotational axis. A second bonding pad (114) is coupled to the rotating frame by a third torsional hinge (112) along the rotational axis.
摘要翻译：微电子机械系统（MEMS）镜装置（100）包括通过沿着旋转轴线（110）的第一扭转铰链（106）联接到旋转框架（108）的反射镜（104）。旋转框架具有限定框架开口（116）的本体和从主体延伸的一组旋转齿（120; 122）。第一接合焊盘（117）位于框架开口中，并通过沿旋转轴线的第二扭转铰链（118; 119）与旋转框架连接。第二接合焊盘（114）通过沿着旋转轴线的第三扭转铰链（112）联接到旋转框架。

3. 发明申请

WO2003042733A1 MICRO-ELECTRO-MECHANICAL VARIABLE OPTICAL ATTENUATOR 审中-公开
标题翻译：微电子机械变量光学衰减器
公开(公告)号：WO2003042733A1
公开(公告)日：2003-05-22
申请号：PCT/US2002/035855
申请日：2002-11-08
申请人： ACTIVE OPTICAL NETWORKS, INC. , NOVOTNY, Vlad , FU, Yee-Chung , WANG, Zuo
发明人： NOVOTNY, Vlad , FU, Yee-Chung , WANG, Zuo
IPC分类号： G02B6/00
CPC分类号： G02B6/353 , G02B6/266 , G02B6/3552 , G02B6/357 , G02B6/3584 , G02B6/3588 , G02B6/3594
摘要： Variable optical attenuators (100) that use a blade (120) in a gap (114) between two fibers (111, 112) to control the optical attenuation without having coupling optics in the gap, where the blade has at least one blade surface at an angle with respect to an end facet of one fiber.
摘要翻译：可变光衰减器（100），其在两个光纤（111,112）之间的间隙（114）中使用刀片（120）来控制所述光学衰减，而不在所述间隙中具有耦合光学器件，其中所述刀片具有至少一个刀片表面相对于一根光纤的端面的角度。

4. 发明申请

WO2006098990A3 TRIMMING A MEMS DEVICE TO FINE TUNE NATURAL FREQUENCY 审中-公开
公开(公告)号：WO2006098990A3
公开(公告)日：2006-09-21
申请号：PCT/US2006/008283
申请日：2006-03-08
申请人： ADVANCED NANO SYTEMS, INC. , FU, Yee-Chung
发明人： FU, Yee-Chung
IPC分类号： G02B26/08
摘要： A mirror device includes a mirror, an anchor, and a spring coupling the mirror to the anchor. The anchor and/or mirror can define one or more rows of holes adjacent to the coupling location of the spring. The natural frequency of the device can be adjusted by removing material between the perimeter of the mirror/anchor and the outermost holes, and between adjacent holes in the same row. Another mirror device includes a mirror, anchors, and springs coupling the mirror to the anchors. The natural frequency of the device can be adjusted by decoupling one or more springs coupling the mirror to the anchors. The mirror of both devices can includes one or more sacrificial portions. The natural frequencies of the both devices can also be adjusted by trimming the sacrificial portions.

5. 发明申请

WO2005081035A2 MEMS MIRROR WITH TRENCHED SURFACE AND TAPERED COMB TEETH 审中-公开
标题翻译：具有激光表面的MEMS镜子和带有切割的COMB TEETH
公开(公告)号：WO2005081035A2
公开(公告)日：2005-09-01
申请号：PCT/US2005/004685
申请日：2005-02-11
申请人： ADVANCED NANO SYSTEMS, INC. , FU, Yee-Chung
发明人： FU, Yee-Chung
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： A micro-electro-mechanical system (MEMS) device (400; 600) includes a mirror having a top surface (406; 606) with trenches (408; 608), a beam (412; 612) connected to the mirror, rotational comb teeth (416; 616) connected to the beam, and one or more springs (422, 428; 622, 628) connecting the beam to a bonding pad (424, 426, 432, 430; 624, 626, 632, 630). The mirror can have a bottom surface (464; 606) for reflecting light. Stationary comb teeth (434, 474; 634; 674) can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror. The comb teeth can have a tapered shape.
摘要翻译：微电子机械系统（MEMS）装置（400; 600）包括具有带有沟槽（408; 608）的顶表面（406; 606）的反射镜，连接到反射镜的光束（412; 612），旋转梳连接到所述梁的齿（416; 616）以及将所述梁连接到焊盘（424,426,432,424; 624,626,632,630）的一个或多个弹簧（422,428; 622,628）。反射镜可以具有用于反射光的底面（464; 606）。固定梳齿（434,447; 634; 674）可以与旋转梳齿在平面内或平面外相互交错。旋转和固定梳齿之间的稳定或振荡电压差可用于振荡或调谐镜子。梳齿可以具有锥形形状。

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