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    • 4. 发明申请
    • METHODS FOR USING REMOTE PLASMA CHEMICAL VAPOR DEPOSITION (RP-CVD) AND SPUTTERING DEPOSITION TO GROW LAYERS IN LIGHT EMITTING DEVICES
    • 在发光装置中使用远程等离子体化学气相沉积(RP-CVD)和溅射沉积成长层的方法
    • WO2017201363A1
    • 2017-11-23
    • PCT/US2017/033466
    • 2017-05-19
    • LUMILEDS LLC
    • WILDESON, IsaacDEB, ParijatNELSON, Erik CharlesKOBAYASHI, Junko
    • H01L33/06H01L21/02H01L33/00H01L33/32
    • Described herein are methods for using remote plasma chemical vapor deposition (RP-CVD) and sputtering deposition to grow layers for light emitting devices. A method includes growing a light emitting device structure on a growth substrate, and growing a tunnel junction on the light emitting device structure using at least one of RP-CVD and sputtering deposition. The tunnel junction includes a p++ layer in direct contact with a p-type region, where the p++ layer is grown by using at least one of RP-CVD and sputtering deposition. Another method for growing a device includes growing a p-type region over a growth substrate using at least one of RP-CVD and sputtering deposition, and growing further layers over the p-type region. Another method for growing a device includes growing a light emitting region and an n-type region using at least one of RP-CVD and sputtering deposition over a p-type region.
    • 这里描述的是使用远程等离子体化学气相沉积(RP-CVD)和溅射沉积来生长用于发光器件的层的方法。 一种方法包括在生长衬底上生长发光器件结构,并且使用RP-CVD和溅射沉积中的至少一种在发光器件结构上生长隧道结。 隧道结包括与p型区直接接触的p ++层,其中通过使用RP-CVD和溅射沉积中的至少一种生长p ++层。 用于生长器件的另一种方法包括使用RP-CVD和溅射沉积中的至少一种在生长衬底上生长p型区域,并且在p型区域上生长另外的层。 用于生长器件的另一种方法包括使用RP-CVD和在p型区域上的溅射沉积中的至少一种生长发光区域和n型区域。
    • 7. 发明申请
    • METHODS FOR GROWING LIGHT EMITTING DEVICES UNDER ULTRA-VIOLET ILLUMINATION
    • 用于在超紫外照射下生长发光装置的方法
    • WO2018081635A1
    • 2018-05-03
    • PCT/US2017/058867
    • 2017-10-27
    • LUMILEDS LLC
    • ISHIKAWA, TsutomuWILDESON, IsaacNELSON, Erik CharlesDEB, Parijat
    • H01L33/00H01L21/02H01L21/268H01L33/32
    • Described herein are methods for growing light emitting devices under ultra-violet (UV) illumination. A method includes growing a III-nitride n-type layer over a III-nitride p-type layer under UV illumination. Another method includes growing a light emitting device structure on a growth substrate and growing a tunnel junction on the light emitting device structure, where certain layers are grown under UV illumination. Another method includes forming a III-nitride tunnel junction n-type layer over the III-nitride p-type layer to form a tunnel junction light emitting diode. A surface of the III-nitride tunnel junction n-type layer is done under illumination during an initial period and a remainder of the formation is completed absent illumination. The UV light has photon energy higher than the III-nitride p-type layer's band gap energy. The UV illumination inhibits formation of Mg-H complexes within the III-nitride p-type layer resulting from hydrogen present in a deposition chamber.
    • 这里描述的是用于在紫外(UV)照射下生长发光器件的方法。 一种方法包括在UV照射下在III族氮化物p型层上生长III族氮化物n型层。 另一种方法包括在生长衬底上生长发光器件结构并在发光器件结构上生长隧道结,其中在UV照射下生长某些层。 另一种方法包括在III族氮化物p型层上方形成III族氮化物隧道结n型层以形成隧道结发光二极管。 III族氮化物隧道结n型层的表面在初始阶段期间在照明下完成,并且在没有照明的情况下完成剩余的形成。 紫外光的光子能量高于III族氮化物p型层的带隙能量。 紫外照射抑制了由沉积室中存在的氢引起的III族氮化物p型层内的Mg-H复合物的形成。