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1. 发明申请

WO2009065740A1 FOURIER TRANSFORM DEFLECTOMETRY SYSTEM AND METHOD 审中-公开
标题翻译： FOURIER变形反射测量系统和方法
公开(公告)号：WO2009065740A1
公开(公告)日：2009-05-28
申请号：PCT/EP2008/065082
申请日：2008-11-06
申请人： LAMBDA-X , BEGHUIN, Didier , JOANNES, Didier
发明人： BEGHUIN, Didier , JOANNES, Didier
IPC分类号： G01N21/956 , G01B11/25 , G01M11/02
CPC分类号： G01N21/95623 , G01B11/25 , G01M11/0264 , G01M11/0278
摘要： The present invention relates to a Fourier transform deflectometry system (1) and method for the optical inspection of a phase and amplitude object (2) placed in an optical path between a grating (3) and an imaging system (4), at a distance h of said grating 3. The grating (3) forms a contrast-based periodic pattern with spatial frequencies μ 0 , v 0 in, respectively, orthogonal axes x,y in an image plane, and the imaging system (4) comprises an objective (5) and an imaging sensor (6) comprising a plurality of photosensitive elements. Spatial frequencies μ 0 , v 0 are equal or lower than the Nyquist frequencies of the imaging system in the respective x and y axes. According to the method of the invention, a first image of said pattern, distorted by the phase and amplitude object (2), is first captured through the objective (5) by the imaging sensor (6). Then, a Fourier transform of said first image in a spatial frequency domain is calculated, at least one first- or higher-order spectrum of said Fourier transform is selected and shifted in said frequency domain, so as to substantially place it at a central frequency of said Fourier transform, and a reverse Fourier transform of said at least one shifted first- or higher-order spectrum of said Fourier transform is performed so as to obtain a complex function g(x,y)=l(x,y)eiφ(x,y), wherein l(x,y) is an intensity and φ(x,y) a phase linked to optical deflection angles θ x , θ y in, respectively, the directions of the x and y axes, in the following form: φ(x,y)=- 2ττh(μ 0 tanθ x +v 0 tanθ y ).
摘要翻译：本发明涉及一种傅里叶变换偏转测量系统（1）和方法，用于对放置在光栅（3）和成像系统（4）之间的光路中的相位和幅度对象（2）进行光学检测，光栅（3）在图像平面中分别形成空间频率μ0，v0 in的正交轴x，y的基于对比度的周期性图案，并且成像系统（4）包括物镜（5））和包括多个感光元件的成像传感器（6）。空间频率μ0，v0等于或低于成像系统在相应x和y轴上的奈奎斯特频率。根据本发明的方法，通过成像传感器（6）首先通过物镜（5）捕获由相位和幅度物体（2）失真的所述图案的第一图像。然后，计算空间频域中的所述第一图像的傅里叶变换，选择所述傅立叶变换的至少一个第一或更高阶频谱，并在所述频域中移位，以便基本上将其置于中心频率并且执行所述傅里叶变换的所述至少一个移位的第一或更高阶光谱的逆傅立叶变换，以便获得复函数g（x，y）= 1（x，y）eif （x，y），其中l（x，y）是强度，f（x，y）分别与光偏转角θx，θyin相关联的x和y轴方向的相位，以下形式：f（x，y）= - 2tth（μ0tan？x + v0tan？y）。

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