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1. 发明申请

WO2009085866A4 GAS TRANSPORT DELAY RESOLUTION FOR SHORT ETCH RECIPES 审中-公开
标题翻译：用于短时间食谱的气体运输延迟分辨率
公开(公告)号：WO2009085866A4
公开(公告)日：2009-11-19
申请号：PCT/US2008087270
申请日：2008-12-17
申请人： LAM RES CORP , SHAREEF IQBAL , TASKAR MARK , ZEMLOCK TONY
发明人： SHAREEF IQBAL , TASKAR MARK , ZEMLOCK TONY
IPC分类号： F17D3/03 , F17D3/00 , H01L21/00
CPC分类号： H01L21/67069 , H01L21/67253 , Y10T137/0318 , Y10T137/877 , Y10T137/87885
摘要： In one embodiment, an apparatus for providing a gas mixture of a plurality of gases, may have a plurality of mass flow controllers (MFCs), a mixing manifold in fluid connection with each plurality of MFCs, a plurality of mixing manifold exits positioned on the mixing manifold; and an isolation device in fluid connection with each of the plurality of mixing manifold exits.
摘要翻译：在一个实施例中，用于提供多种气体的气体混合物的设备可以具有多个质量流量控制器（MFC），与每个多个MFC流体连接的混合歧管，位于所述多个混合歧管中的多个混合歧管出口混合歧管; 以及与多个混合歧管出口中的每一个流体连接的隔离装置。

2. 发明申请

WO2009085866A3 GAS TRANSPORT DELAY RESOLUTION FOR SHORT ETCH RECIPES 审中-公开
标题翻译：气体运输延迟解决方案
公开(公告)号：WO2009085866A3
公开(公告)日：2009-10-01
申请号：PCT/US2008087270
申请日：2008-12-17
申请人： LAM RES CORP , SHAREEF IQBAL , TASKAR MARK , ZEMLOCK TONY
发明人： SHAREEF IQBAL , TASKAR MARK , ZEMLOCK TONY
IPC分类号： F17D3/03 , F17D3/00 , H01L21/00
CPC分类号： H01L21/67069 , H01L21/67253 , Y10T137/0318 , Y10T137/877 , Y10T137/87885
摘要： In one embodiment, an apparatus for providing a gas mixture of a plurality of gases, may have a plurality of mass flow controllers (MFCs), a mixing manifold in fluid connection with each plurality of MFCs, a plurality of mixing manifold exits positioned on the mixing manifold; and an isolation device in fluid connection with each of the plurality of mixing manifold exits.
摘要翻译：在一个实施例中，用于提供多种气体的气体混合物的设备可以具有多个质量流量控制器（MFC），与每个MFC流体连接的混合歧管，多个混合歧管出口定位在混合歧管以及与多个混合歧管出口中的每一个流体连接的隔离装置。

3. 发明申请

WO2006135624B1 OPTIMIZED ACTIVATION PREVENTION ASSEMBLY FOR A GAS DELIVERY SYSTEM AND METHODS THEREFOR 审中-公开
标题翻译：用于气体输送系统的优化活化预防装置及其方法
公开(公告)号：WO2006135624B1
公开(公告)日：2008-01-17
申请号：PCT/US2006022060
申请日：2006-06-06
申请人： LAM RES CORP , TASKAR MARK
发明人： TASKAR MARK
IPC分类号： F16K35/00
CPC分类号： F16K35/06 , Y10T70/5637 , Y10T137/0491 , Y10T137/7069
摘要： An optimized activation prevention assembly for a gas delivery system is disclosed. The apparatus includes a pneumatically operated valve assembly. The apparatus also includes a toggle switch mechanically attached to the pneumatically operated valve assembly, the toggle switch includes a toggle arm, the toggle arm being positioned in one of an activation zone and a deactivation zone, wherein when the toggle arm is positioned in the activation zone, the pneumatically operated valve is activated, and wherein when the toggle arm is positioned in the deactivation zone, the pneumatically operated valve is deactivated. The apparatus further includes an activation prevention mechanism attached to the toggle switch, wherein when the activation prevention mechanism being configured for preventing the toggle arm from being repositioned from the deactivation zone to the activation zone without at least bypassing a lockout function of the optimized activation prevention mechanism.
摘要翻译：公开了一种用于气体输送系统的优化的激活预防组件。该装置包括气动阀组件。该装置还包括机械连接到气动操作的阀组件上的拨动开关，该拨动开关包括肘节臂，肘节臂位于活动区域和失活区域中的一个中，其中当肘节臂位于激活状态时气动阀被启动，并且其中当肘节臂位于停用区域中时，气动操作的阀被停用。所述装置还包括附接到所述拨动开关的激活预防机构，其中当所述启动防止机构被配置为防止所述肘节臂从所述停用区域重新定位到所述激活区域，而不至少绕过所述优化的激活预防的锁定功能机制。

4. 发明申请

WO2006135624A2 OPTIMIZED ACTIVATION PREVENTION ASSEMBLY FOR A GAS DELIVERY SYSTEM AND METHODS THEREFOR 审中-公开
标题翻译：用于气体输送系统的优化活化预防装置及其方法
公开(公告)号：WO2006135624A2
公开(公告)日：2006-12-21
申请号：PCT/US2006022060
申请日：2006-06-06
申请人： LAM RES CORP , TASKAR MARK
发明人： TASKAR MARK
IPC分类号： F16K35/00
CPC分类号： F16K35/06 , Y10T70/5637 , Y10T137/0491 , Y10T137/7069
摘要： An optimized activation prevention assembly for a gas delivery system is disclosed. The apparatus includes a pneumatically operated valve assembly. The apparatus also includes a toggle switch mechanically attached to the pneumatically operated valve assembly, the toggle switch includes a toggle arm, the toggle arm being positioned in one of an activation zone and a deactivation zone, wherein when the toggle arm is positioned in the activation zone, the pneumatically operated valve is activated, and wherein when the toggle arm is positioned in the deactivation zone, the pneumatically operated valve is deactivated. The apparatus further includes an activation prevention mechanism attached to the toggle switch, wherein when the activation prevention mechanism being configured for preventing the toggle arm from being repositioned from the deactivation zone to the activation zone without at least bypassing a lockout function of the optimized activation prevention mechanism.
摘要翻译：公开了一种用于气体输送系统的优化的激活预防组件。该装置包括气动阀组件。该装置还包括机械连接到气动操作的阀组件上的拨动开关，该拨动开关包括肘节臂，肘节臂位于活动区域和失活区域中的一个中，其中当肘节臂位于激活状态时气动阀被启动，并且其中当肘节臂位于停用区域中时，气动操作的阀被停用。所述装置还包括附接到所述拨动开关的激活预防机构，其中当所述启动防止机构被配置为防止所述肘节臂从所述停用区域重新定位到所述激活区域，而不至少绕过所述优化的激活预防的锁定功能机制。

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