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1. 发明申请

WO2012170477A3 USING THREE-DIMENSIONAL REPRESENTATIONS FOR DEFECT-RELATED APPLICATIONS 审中-公开
标题翻译：使用缺陷相关应用的三维表示法
公开(公告)号：WO2012170477A3
公开(公告)日：2013-04-25
申请号：PCT/US2012041019
申请日：2012-06-06
申请人： KLA TENCOR CORP , PARK ALLEN , CHANG ELLIS , AJI PRASHANT A , LANGE STEVEN R
发明人： PARK ALLEN , CHANG ELLIS , AJI PRASHANT A , LANGE STEVEN R
IPC分类号： H01L21/66
CPC分类号： G06F17/5068 , G01N21/9501 , G06F17/50 , G06F17/5009 , G06F2217/12 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： A method for determining one or more inspection parameters for a wafer inspection recipe is described. The method comprises the steps of: generating a three-dimensional representation of one or more layers of a wafer based on design data; and determining one or more inspection parameters for a wafer inspection recipe based on the three-dimensional representation. The method is performed by a computer system.
摘要翻译：描述了一种用于确定晶片检查配方的一个或多个检查参数的方法。该方法包括以下步骤：基于设计数据生成晶片的一层或多层的三维表示; 以及基于所述三维表示确定用于晶片检查配方的一个或多个检查参数。该方法由计算机系统执行。

2. 发明申请

WO03001146A9 APPARATUS AND METHODS FOR REDUCING THIN FILM COLOR VARIATION IN OPTICAL INSPECTION OF SEMICONDUCTOR DEVICES AND OTHER SURFACES 审中-公开
标题翻译：用于减少半导体器件和其他表面的光学检查中的薄膜变色的装置和方法
公开(公告)号：WO03001146A9
公开(公告)日：2004-05-06
申请号：PCT/US0220017
申请日：2002-06-21
申请人： KLA TENCOR CORP
发明人： GUAN YU , FU HONG , LANGE STEVEN R
IPC分类号： G01B11/06 , G01J3/10 , G01J3/46
CPC分类号： G01J3/10 , G01B11/0625 , G01J3/46
摘要： Disclosed are methods and apparatus for designing an optical spectrum of an illumination light beam within an optical inspection system. A set of conditions for inspecting a film on a sample by directing an illumination light beam at the sample is determined. At least a portion of the illumination light beam is reflected off the sample and used to generate an image of at least a portion of the film on the sample. A plurality of peak wavelength values are determined for the optical spectrum of the illumination light beam so as to control color variation in the image of the film portion. The determination of the peak wavelengths is based on the determined set of conditions and a selected thickness range of the film. In one specific embodiment, the color variation is reduced, while in another embodiment the color variation is increased to enhance pattern contrast. An apparatus which implements the designed optical spectrum is also disclosed.
摘要翻译：公开了用于设计光学检查系统内的照明光束的光谱的方法和装置。确定通过在样品上引导照明光束来检查样品上的胶片的一组条件。照明光束的至少一部分从样品反射并用于产生样品上的膜的至少一部分的图像。针对照明光束的光谱确定多个峰值波长值，以便控制胶片部分的图像中的颜色变化。峰值波长的确定基于所确定的条件集合和膜的选定厚度范围。在一个具体实施例中，颜色变化减小，而在另一实施例中，颜色变化增加以增强图案对比度。还公开了一种实现设计的光谱的装置。

3. 发明申请

WO2004092716B1 METHOD AND APPARATUS FOR INSPECTING A SUBSTRATE USING A PLURALITY OF INSPECTION WAVELENGTH REGIMES 审中-公开
标题翻译：使用多个检验波长方案检查基板的方法和装置
公开(公告)号：WO2004092716B1
公开(公告)日：2005-01-20
申请号：PCT/US2004010324
申请日：2004-04-05
申请人： KLA TENCOR TECH CORP , LANGE STEVEN R
发明人： LANGE STEVEN R
IPC分类号： G01N21/95 , G01N33/543 , H01L21/66
CPC分类号： G01N33/54366 , G01N21/9501
摘要： A surface inspection apparatus and method are disclosed. In particular, the method and apparatus are capable of inspecting a surface in two (or more) optical regimes thereby enhancing the defect detection properties of such method and apparatus. A method involves illuminating the surface with light in a first wavelength range and a second wavelength range. The first wavelength range selected so that the surface is opaque to the light of the first wavelength range so that a resultant optical signal is produced that is predominated by diffractive and scattering properties of the surface. The second wavelength range is selected so that the surface is at least partially transmissive to light in the second wavelength range so that another resultant optical signal is produced that is predominated by thin film optical properties of the surface. The resultant optical signals are detected and processed to detect defects in the surface. Devices for implementing such methods are also disclosed.
摘要翻译：公开了一种表面检查装置和方法。特别地，该方法和装置能够在两个（或多个）光学方式中检查表面，从而增强了这种方法和装置的缺陷检测特性。一种方法包括用在第一波长范围和第二波长范围内的光来照射该表面。选择的第一波长范围使得表面对于第一波长范围的光是不透明的，使得产生以表面的衍射和散射性质为主的所得光信号。选择第二波长范围，使得表面对于第二波长范围内的光至少部分透射，从而产生以表面的薄膜光学性质为主的另外产生的光信号。检测并处理所得到的光信号以检测表面中的缺陷。还公开了用于实现这些方法的装置。

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