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    • 10. 发明申请
    • IMAGING OPTICAL UNIT
    • 成像光学单元
    • WO2012163794A1
    • 2012-12-06
    • PCT/EP2012/059697
    • 2012-05-24
    • CARL ZEISS SMT GMBHWOLF, Alexander
    • WOLF, Alexander
    • G03F7/20G02B17/06
    • G02B17/0647G02B17/0663G02B27/0081G03F7/70058G03F7/70275
    • An imaging optical unit (50) serves for imaging an object field (4) into an image field (8). An imaging beam path (AS) between the object field (4) and the image field (8) is subdivided into a plurality of partial imaging beam paths (TAS). The imaging optical unit (50) is embodied such that the partial imaging beam paths (TAS) run between the object field (4) and the image field (8) in a manner completely separated from one another and guided by optical components (Ml to M6) of the imaging optical unit (50), that is to say that nowhere in the beam path between the object field (4) and the image field (8) do the partial imaging beam paths (TAS) impinge on identical regions of beam-guiding surfaces (20) of the imaging optical unit (50). This results in an imaging optical unit in which a resolution capabil¬ ity, particularly in the production of micro- or nanostructured semiconduc- tor components, is increased.
    • 成像光学单元(50)用于将物场(4)成像为图像场(8)。 对象场(4)和图像场(8)之间的成像光束路径(AS)被细分为多个部分成像光束路径(TAS)。 成像光学单元(50)被实施为使得部分成像光束路径(TAS)以完全彼此分离的方式在物场(4)和图像场(8)之间延伸并由光学部件(M1至 成像光学单元(50)的M6),也就是说在物场(4)和图像场(8)之间的光束路径中的任何地方都不进行部分成像光束路径(TAS)照射在相同的光束区域 - 成像光学单元(50)的导向表面(20)。 这导致成像光学单元,其中分辨率能力,特别是在微结构或纳米结构的半导体组件的生产中增加。