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    • 1. 发明申请
    • POLYMER REPLICATED INTERDIGITATED ELECTRODE ARRAY FOR (BIO)SENSING APPLICATIONS
    • 聚合物复用电极阵列(BIO)感应应用
    • WO2007042356A1
    • 2007-04-19
    • PCT/EP2006/066069
    • 2006-09-06
    • INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM VZWINNOGENETICSLAUREYN, WimSULS, JanJACOBS, Paul
    • LAUREYN, WimSULS, JanJACOBS, Paul
    • G01N27/22C12Q1/68
    • C12Q1/001G01N27/021G01N33/5438Y10T29/49Y10T29/49002Y10T29/49155
    • Interdigitated electrode arrays are very promising devices for multi- parameter (bio)sensing, for example the label-free detection of nucleic acid hybridisation for diagnostic applications. The current invention comprises an innovative method for the affordable manufacturing of polymer-based arrays of interdigitated electrodes with µm-dimensions. The method is based on a combination of an appropriate three-dimensional structure and a single and directional deposition of conductive material. The three-dimensional structure can be realized in a polymer material using a moulding step, for which the moulds are manufactured by electroplating as a reverse copy of a silicon master structure. In order to ensure sufficient electrical isolation and individual, but convenient, accessibility of the sensors in the array, the interdigitated electrode regions need to be complemented with specific features on the three-dimensional structure. Combined with the use of e.g. shadow masks in the deposition step, these features allow for the site-specific deposition of the conductive material. The technology described has the additional advantage to integrate highly miniaturized and arrayed electronics elements into polymer micro-fluidics technology, which leads to the affordable manufacturing of (bio)sensor arrays.
    • 交叉电极阵列是用于多参数(生物)感测的非常有希望的装置,例如用于诊断应用的无标记检测核酸杂交。 本发明包括一种创新的方法,用于负责制造具有μm尺寸的交错电极的基于聚合物的阵列。 该方法基于合适的三维结构和导电材料的单次和定向沉积的组合。 三维结构可以在使用成型步骤的聚合物材料中实现,其中通过电镀制造模具作为硅主体结构的反向拷贝。 为了确保阵列中的传感器具有足够的电隔离和单独但方便的可访问性,交叉电极区域需要在三维结构上与特定特征相辅相成。 结合使用例如 在沉积步骤中的阴影掩模,这些特征允许导电材料的位置特异性沉积。 所描述的技术具有将高度微型化和排列的电子元件集成到聚合物微流体技术中的额外优点,这导致(bio)传感器阵列的负担得起的制造。