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1. 发明申请

WO2004038916A3 MICRO-ELECTROMECHANICAL VARACTOR WITH ENHANCED TUNING RANGE 审中-公开
标题翻译：具有增强调谐范围的微电子变压器
公开(公告)号：WO2004038916A3
公开(公告)日：2004-08-12
申请号：PCT/EP0312399
申请日：2003-09-18
申请人： IBM , IBM FRANCE
发明人： CHINTHAKINDI ANIL K , GROVES ROBERT A , STEIN KENNETH J , SUBBANNA SESHADRI , VOLANT RICHARD P
IPC分类号： B81B7/00 , B81C1/00 , H01G5/011 , H01G5/18 , H03J3/18 , B81B3/00 , H01G5/16
CPC分类号： H01G5/18 , B81B2201/01 , H01G5/011 , Y10S257/924
摘要： A three-dimensional micro-electromechanical (MEM) varactor is described wherein a movable beam (50) and fixed electrodes (51) are respectively fabricated on separate substrates coupled to each other. The movable beam with comb-drive electrodes are fabricated on the "chip side" while the fixed bottom electrode is fabricated on a separated substrate "carrier side". Upon fabrication of the device on both surfaces of the substrate, the chip side device is diced and "flipped over", aligned and joined to the "carrier" substrate to form the final device. Comb-drive (fins) electrodes are used for actuation while the motion of the electrode provides changes in capacitance. Due to the constant driving forces involved, a large capacitance tuning range can be obtained. The three dimensional aspect of the device avails large surface area. When large aspect ratio features are provided, a lower actuation voltage can be used. Upon fabrication, the MEMS device is completely encapsulated, requiring no additional packaging of the device. Further, since alignment and bonding can be done on a wafer scale (wafer scale MEMS packaging), an improved device yield can be obtained at a lower cost.
摘要翻译：描述了三维微机电（MEM）变容二极管，其中可移动光束（50）和固定电极（51）分别制造在彼此耦合的分离的基板上。具有梳状驱动电极的可移动光束在“芯片侧”上制造，而固定底部电极制造在分离的基板“载体侧”上。在衬底的两个表面上制造器件时，芯片侧器件被切割并“翻转”，对准并接合到“载体”衬底以形成最终器件。梳状驱动（鳍）电极用于致动，同时电极的运动提供电容的变化。由于所涉及的驱动力恒定，可以获得大的电容调谐范围。该装置的三维方面具有较大的表面积。当提供大的纵横比特征时，可以使用较低的致动电压。在制造时，MEMS器件被完全封装，不需要额外的器件封装。此外，由于可以在晶片规模（晶片级MEMS封装）上进行取向和接合，所以可以以更低的成本获得改进的器件产量。

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