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    • 2. 发明申请
    • PRESSURE-BASED GAS FLOW CONTROLLER WITH DYNAMIC SELF-CALIBRATION
    • 基于压力的气体流量控制器,具有动态自校准功能
    • WO2014152755A2
    • 2014-09-25
    • PCT/US2014/027698
    • 2014-03-14
    • HORWITZ, Christopher, Max
    • HORWITZ, Christopher, Max
    • G01L23/04
    • G05D7/0635G01F1/76G01F1/86G01F1/88G01F25/0053
    • A method of measuring a molecular rate of gas flow from an upstream source of gas at a pressure higher than a pressure of a destination includes flowing the gas through an upstream valve into a cavity of known volume, then through a restrictor element before proceeding to the destination, controlling the upstream valve to vary a flow rate of the gas through the upstream valve in a determined manner such that its average pressure in the cavity correlates with an average level of gas flow and such that variations in pressure in the cavity induced by varying the flow rate of gas through the upstream valve in the determined manner induce instantaneous pressure variations smaller than 30% of the average pressure in that cavity; and using the variations in the pressure in the cavity associated with varying the flow rate of gas through the upstream valve in the determined manner to determine the molecular rate of gas flow to the destination in real time.
    • 在高于目的地的压力的压力下测量来自上游气体源的气体流的分子速率的方法包括将气体通过上游阀流入已知体积的空腔中,然后通过限流元件进行到 目的地,控制上游阀以确定的方式改变通过上游阀的气体的流速,使得其在空腔中的平均压力与平均气体流量相关,并且使得通过变化引起的空腔中的压力变化 以确定的方式通过上游阀的气体的流量引起小于该空腔中的平均压力的30%的瞬时压力变化; 并且以确定的方式使用与通过上游阀改变气体流速相关联的空腔中的压力的​​变化,以确定实时地到达目的地的气体的分子速率。