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1. 发明申请

WO2005005833A3 INTEGRATION OF AUTOMATED CRYOPUMP SAFETY PURGE 审中-公开
标题翻译：自动化冷库安全清洗系统的整合
公开(公告)号：WO2005005833A3
公开(公告)日：2005-04-21
申请号：PCT/US2004018269
申请日：2004-06-09
申请人： HELIX TECH CORP , AMUNDSEN PAUL E , BUONPANE MAUREEN , ANDREWS DOUG , JACOBS JORDAN
发明人： AMUNDSEN PAUL E , BUONPANE MAUREEN , ANDREWS DOUG , JACOBS JORDAN
IPC分类号： F04B37/08 , F04B49/06
CPC分类号： F04B37/085 , F04B37/08 , F04B49/065
摘要： An electronic controller is integral with a cryopump and provides an offline solution for purging a cryopump and an exhaust line during unsafe conditions. The electronic controller is responsible for controlling the opening and closing of purge, exhaust purge and gate valves coupled to the cryopump. The electronic controller can preempt any attempts from other systems to control these valves during unsafe conditions. An unsafe condition can be a power failure in the cryopump, a dangerous temperature in the cryopump or a temperature sensing diode that is not operating properly. When an unsafe condition is determined, the exhaust purge valve is opened and the gate valve closed, while the opening of a purge valve may be delayed for a safe period of time. If the unsafe condition still exists when the safe period of time elapses, the purge valve is allowed to open. A fail-safe purge valve release and time delay mechanism can be used to ensure that the purge valve opens after the period of time elapses. Electrochemical capacitors may be used to store an amount of energy to hold a normally open purge valve closed for a safe period of time. When this energy is discharged and the unsafe condition still exists, the purge valve can automatically open.
摘要翻译：电子控制器与低温泵集成在一起，并提供了一种离线解决方案，用于在不安全条件下清洗低温泵和排气管线。电子控制器负责控制与低温泵连接的净化，排气净化和闸阀的开启和关闭。在不安全的条件下，电子控制器可以阻止来自其他系统的任何尝试来控制这些阀门。不安全的情况可能是低温泵的电源故障，低温泵中的危险温度或运行不正常的温度传感二极管。当确定不安全状况时，排气净化阀打开，闸阀关闭，而排气阀打开可能会延迟一段安全的时间。如果在安全时间段过后仍然存在不安全状况，则允许排气阀打开。故障安全放气阀释放和时间延迟机制可用于确保放气阀在一段时间后打开。可以使用电化学电容器来存储一定量的能量，以将常开放气阀关闭一段安全的时间。当这种能量被释放并且不安全状态仍然存在时，清洗阀可以自动打开。

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