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1. 发明申请

WO2010074659A1 3D MOLD FOR MANUFACTURE OF SUB-MICRON 3D STRUCTURES USING 2-D PHOTON LITHOGRAPHY AND NANOIMPRINTING AND PROCESS THEREOF 审中-公开
标题翻译：使用二维光子地平线和纳米压印及其工艺制造亚微米三维结构的3D模具
公开(公告)号：WO2010074659A1
公开(公告)日：2010-07-01
申请号：PCT/SG2009/000443
申请日：2009-11-23
申请人： HELIOS APPLIED SYSTEMS PTE LTD , KAN, Shyi-Herng
发明人： KAN, Shyi-Herng
IPC分类号： G03F1/00 , G03F7/24 , G03F7/40
CPC分类号： B29D11/00365 , B82Y10/00 , B82Y40/00 , G02B3/04 , G02B3/12 , G03F7/0002 , G03F7/2053 , G03F7/70375
摘要： A process to manufacture a 3D mold to fabricate a high-throughput and low cost sub-micron 3D structure product is disclosed. The process integrates use of 2-photon laser lithography and 3D write technology to make a 3D mold of each layer of the 3D structure product, and then use nanoimprinting to form a sheet of polymer film of each layer of the 3D structure from the said 3D mold of that layer. Each layer of the sheet of polymer film is then fabricated into the sub-micron 3D structure product. The 3D mold of each layer of a high-throughput and low cost sub-micron 3D structure product, is further used to make master molds which is then used to form a sheet of polymer film of each layer of the 3D structure to fabricate the sub-micron 3D structure product. Applications using this process are also disclosed.
摘要翻译：公开了一种制造3D模具以制造高通量和低成本亚微米3D结构产品的工艺。该过程集成了使用双光子激光平版印刷和3D写入技术来制作3D结构产品的每一层的3D模具，然后使用纳米压印形成来自所述3D的3D结构的每层的聚合物膜片该层的模具。然后将各层聚合物薄膜制成亚微米3D结构产品。高通量和低成本亚微米3D结构产品的每一层的3D模具进一步用于制造主模具，然后将其用于形成3D结构的每层的聚合物膜片，以制造子 -micron 3D结构产品。还公开了使用该方法的应用。

2. 发明申请

WO2009014500A1 DEVICE AND METHOD FOR FOCUSING A BEAM OF LIGHT WITH REDUCED FOCAL PLANE DISTORTION 审中-公开
标题翻译：用减轻焦点平面失真聚焦光束的装置和方法
公开(公告)号：WO2009014500A1
公开(公告)日：2009-01-29
申请号：PCT/SG2008/000262
申请日：2008-07-21
申请人： AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH , KAN, Shyi-Herng , HSIEH, Tseng-Ming , YING, Jackie Y.
发明人： KAN, Shyi-Herng , HSIEH, Tseng-Ming , YING, Jackie Y.
IPC分类号： G02B27/30 , G02B27/09
CPC分类号： B29C64/135
摘要： A system for focusing a light beam may be used for multi-photon stereolithography. It comprises a collimator or expander for adjusting the beam divergence and a scanner for directing the beam onto a focusing device to focus the beam to a focal point or beam waist and to scan the focused beam. A controller controls adjustment of the beam divergence so that the focal point or beam waist is scanned substantially in a plane. A light source may be provided to generate the light beam. The expander may comprise a diverging lens and a converging lens for expanding the beam to produce a collimated beam. The divergence of the collimated beam is dependent on the distance between the diverging lens and the converging lens, which may be adjusted to adjust the beam divergence. The focusing device may comprise a dry objective lens to focus the collimated beam onto the target material to induce multi-photon absorption in the target material at the beam waist of the focused beam.
摘要翻译：用于聚焦光束的系统可以用于多光子立体光刻。它包括用于调整光束发散的准直器或扩展器和用于将光束引导到聚焦装置上以将光束聚焦到焦点或光束腰部并扫描聚焦光束的扫描器。控制器控制光束发散的调节，使得焦点或光束腰部基本上在平面中扫描。可以提供光源以产生光束。扩展器可以包括发散透镜和用于展开光束以产生准直光束的会聚透镜。准直光束的发散度取决于发散透镜和会聚透镜之间的距离，其可以被调整以调节光束发散。聚焦装置可以包括干物镜，以将准直光束聚焦到目标材料上，以在聚焦光束的束腰处的目标材料中引起多光子吸收。

3. 发明申请

WO2009014501A1 TWO-PHOTON STEREOLITHOGRAPHY USING PHOTOCURABLE COMPOSITIONS 审中-公开
标题翻译：使用光电组合物的双光子立体成像
公开(公告)号：WO2009014501A1
公开(公告)日：2009-01-29
申请号：PCT/SG2008/000264
申请日：2008-07-21
申请人： AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH , KAN, Shyi-Herng , HSIEH, Tseng-Ming , YING, Jackie, Y.
发明人： KAN, Shyi-Herng , HSIEH, Tseng-Ming , YING, Jackie, Y.
IPC分类号： G03F7/028
CPC分类号： B29C64/135
摘要： Two-photon stereolithography can be performed using a photocurable material comprising a poly(meth)acrylate having a (meth)acrylate functionality of at least 3 and a molecular weight (MW) of at least 650, a urethane(meth)acrylate having a (meth)acrylate functionality of 2 to 4 and a MW of 400 to 10,000, a di(meth)acrylate made from bisphenol A or bisphenol F; and a photoinitiator. A beam of light is focused to a focus region of the material to induce two-photon absorption in the focus region, and thus polymerization of the material in the focus region. The beam is scanned across said material according to a pre-selected pattern so that the beam is focused to different pre-selected regions, to induce polymerization of the material at the pre-selected regions.
摘要翻译：双光子立体光刻可以使用包含（甲基）丙烯酸酯官能度为至少3，分子量（MW）至少为650的聚（甲基）丙烯酸酯的光固化材料，具有（（甲基）丙烯酸酯官能度为2〜4，MW为400〜10,000，由双酚A或双酚F制成的二（甲基）丙烯酸酯; 和光引发剂。光束被聚焦到材料的焦点区域，以在聚焦区域中引起双光子吸收，从而聚焦在聚焦区域中的材料。根据预先选择的图案将光束扫描穿过所述材料，使得光束被聚焦到不同的预选区域，以在预选区域处诱导材料的聚合。

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