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    • 1. 发明申请
    • SLIT VALVE DOOR
    • 滑阀门
    • WO2007149530A3
    • 2008-07-24
    • PCT/US2007014469
    • 2007-06-21
    • GREENE TWEED INCQUARTAPELLA CARMINEDWARDS TIMOTHY
    • QUARTAPELLA CARMINEDWARDS TIMOTHY
    • F16K1/46
    • F16K3/0263F16K51/02
    • A slit valve is provided which includes a door that has an interior surface configured to disrupt or redirect the direct flow of harmful chemicals, such as plasma, from directly flowing towards the seals of the slit valve and thus increasing the seal's life cycle by providing an interior surface that extends at least partially inwardly into the door and which can be configured to have a contour or texture on an interior surface of the door. Slit valve doors having target materials on an interior surface of the door are also provided so as to attract and/or render harsh chemicals less reactive, neutral, diverted or absorbed prior to contacting a sealing member within the door.
    • 提供了一种狭缝阀,其包括门,该门具有被构造成破坏或重定向诸如等离子体的有害化学物质的直接流动的内表面,直接流向狭缝阀的密封件,从而通过提供密封件的生命周期来提高密封件的使用寿命 内表面,其至少部分地向内延伸到门中,并且其可以被配置为在门的内表面上具有轮廓或纹理。 在门的内表面上具有目标材料的狭缝阀门还设置成在接触门内的密封构件之前吸引和/或使恶劣的化学物质反应性较低,中性,转移或吸收。