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1. 发明申请

WO2005006396A2 MEGASONIC CLEANING USING SUPERSATURATED CLEANING SOLUTION 审中-公开
标题翻译：超声波清洗使用过滤清洗液
公开(公告)号：WO2005006396A2
公开(公告)日：2005-01-20
申请号：PCT/US2004018464
申请日：2004-06-10
申请人： GOLDFINGER TECHNOLOGIES LLC , FRANKLIN COLE S , WU YI , FRASER BRIAN
发明人： FRANKLIN COLE S , WU YI , FRASER BRIAN
IPC分类号： B08B3/00 , B08B3/12 , B08B6/00 , B08B7/04 , H01L20060101 , H01L
CPC分类号： B08B3/12 , H01L21/67051
摘要： A method and system for the megasonic cleaning of one or more substrates that reduces damage to the substrate(s) resulting from the megasonic energy. The substrates are supported in a process chamber and contacted with a cleaning solution comprising a cleaning liquid having carbon dioxide gas dissolved in the cleaning liquid in such amounts that the carbon dioxide gas is at a supersaturated concentration for the conditions within the process chamber. Megasonic energy is then transmitted to the substrate. The cleaning solution provides protection from damage resulting from the application of megasonic/acoustical energy. In another aspect, the invention is a system for carrying out the method. The invention is not limited to carbon dioxide but can be used in conjunction with any gas that, when so dissolved in a cleaning liquid, protects substrates from being damaged by the application of megasonic/acoustical energy.
摘要翻译：一种用于超声波清洗一个或多个基板的方法和系统，所述方法和系统减少由兆频超声波能量引起的对基板的损坏。衬底被支撑在处理室中并与包含溶解在清洁液体中的二氧化碳气体的清洁液体接触，其量使得二氧化碳气体在处理室内的条件下处于过饱和浓度。兆声波能量然后被传输到衬底。清洁解决方案可防止应用兆声波/声学能量造成的损坏。另一方面，本发明是用于执行该方法的系统。本发明不限于二氧化碳，而是可以与任何气体结合使用，当溶解在清洁液体中时，该气体保护基材免于因施加兆声波/声学能量而受损。

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