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    • 5. 发明申请
    • METHOD FOR MANUFACTURING A COLOR FILTER, COLOR FILTER AND SOLID-STATE IMAGING DEVICE
    • 制造彩色滤光片,彩色滤光片和固态成像装置的方法
    • WO2013032033A1
    • 2013-03-07
    • PCT/JP2012/072826
    • 2012-08-31
    • FUJIFILM CorporationSUGISHIMA, YasuoYOSHIBAYASHI, MitsujiAOYAGI, KaoruKANEKO, YushiMURO, Naotsugu
    • SUGISHIMA, YasuoYOSHIBAYASHI, MitsujiAOYAGI, KaoruKANEKO, YushiMURO, Naotsugu
    • G02B5/20H01L27/14
    • G02B5/201G02B3/0006G02B5/20G02B5/223G02B5/286G02B13/0085G03F7/0007H01L27/14621H01L27/14685
    • A method for manufacturing a color filter, including: (a) forming a first colored layer with a first coloring composition to form a plurality of first colored pixels; (b) patterning the first colored layer by dry etching to form a plurality of first through-holes in the first colored layer; (c) stacking a second colored layer with a second coloring composition on the first colored layer such that the second coloring composition is embedded inside each of the first through-holes to form a plurality of second colored pixels; (d) patterning the second colored layer by dry etching such that a plurality of second through-holes apart from the first through-holes are formed in the first colored layer to form the plurality of second colored pixels; (e) stacking one or more colored layers including a third colored layer with a third coloring composition on the first colored layer such that the third coloring composition is embedded inside each of the second through-holes to form a plurality of third colored pixel; and (f) subjecting the one or more colored layers stacked on the first colored layer to planarization treatment until the first colored layer is at least exposed, wherein the first coloring composition contains a colorant and a resin, a content of the colorant is 55% by mass or more based on the total solids of the coloring composition, and the solid acid number of a resin having a highest solid acid number is 80 mg KOH/g or less.
    • 一种制造滤色器的方法,包括:(a)用第一着色组合物形成第一着色层以形成多个第一着色像素; (b)通过干蚀刻图案化所述第一着色层以在所述第一着色层中形成多个第一通孔; (c)在第一着色层上堆叠具有第二着色组合物的第二着色层,使得第二着色组合物嵌入每个第一通孔内以形成多个第二彩色像​​素; (d)通过干蚀刻图案化第二着色层,使得在第一着色层中形成与第一通孔分开的多个第二通孔,以形成多个第二彩色像​​素; (e)在第一着色层上堆叠包括第三着色组合物的第三着色层的一个或多个着色层,使得第三着色组合物嵌入每个第二通孔内以形成多个第三着色像素; 和(f)使堆叠在第一着色层上的一个或多个着色层进行平面化处理,直到第一着色层至少暴露,其中第一着色组合物含有着色剂和树脂,着色剂的含量为55% 以上,基于着色组合物的总固体,固体酸数最高的树脂的固体酸数为80mgKOH / g以下。
    • 8. 发明申请
    • METHOD FOR MANUFACTURING A COLOR FILTER, COLOR FILTER AND SOLID-STATE IMAGING DEVICE
    • 制造彩色滤光片,彩色滤光片和固态成像装置的方法
    • WO2013032037A1
    • 2013-03-07
    • PCT/JP2012/072830
    • 2012-08-31
    • FUJIFILM CorporationSUGISHIMA, YasuoYOSHIBAYASHI, MitsujiAOYAGI, KaoruKANEKO, Yushi
    • SUGISHIMA, YasuoYOSHIBAYASHI, MitsujiAOYAGI, KaoruKANEKO, Yushi
    • G02B5/20H01L27/14
    • G03F7/0007G02B3/0006G02B5/20G02B5/201G02B5/223G02B5/286H01L27/14621H01L27/14685
    • A method for manufacturing a color filter,including: (a) forming a first colored layer with a first coloring composition to form a plurality of first colored pixels; (b) patterning the first colored layer by a dry etching to form a plurality of first through-holes in the first colored layer; (c) stacking a second colored layer with a second coloring composition on the first colored layer such that the second coloring composition is embedded inside each of the first through-holes so as to form a plurality of second colored pixels; (d) patterning the second colored layer by dry etching such that a plurality of second through-holes apart from the first through-holes are formed on the first colored layer to form the plurality of first colored pixels; (d') performing a planarization treatment on the second colored layer until at least the first colored layer is exposed; (e) stacking a third colored radiation sensitive layer with the third coloring radiation sensitive composition on the first colored layer such that the third coloring radiation sensitive composition is embedded inside each of the second through-holes so as to form a plurality of third colored pixels; and (f) removing the third colored radiation sensitive layer by exposing and developing a position of the third colored radiation sensitive layer which corresponds to the second through-holes formed in the first colored layer, wherein the process (d') is performed after the process (c) and before the process (d), or after the process (d) and before the process (e), and the first coloring composition contains a colorant and a resin, a content of the colorant is 60% by mass or more based on the total solids of the first coloring composition, and the solid acid number of a resin having the highest solid acid number is 80 mg KOH/g or less.
    • 一种制造滤色器的方法,包括:(a)用第一着色组合物形成第一着色层以形成多个第一着色像素; (b)通过干蚀刻图案化所述第一着色层以在所述第一着色层中形成多个第一通孔; (c)在第一着色层上堆叠具有第二着色组合物的第二着色层,使得第二着色组合物嵌入每个第一通孔内,以形成多个第二彩色像​​素; (d)通过干蚀刻图案化第二着色层,使得在第一着色层上形成与第一通孔分开的多个第二通孔,以形成多个第一着色像素; (d')对所述第二着色层进行平坦化处理,直到至少所述第一着色层露出为止; (e)将第三着色辐射敏感层与第三着色辐射敏感组合物堆叠在第一着色层上,使得第三着色辐射敏感组合物嵌入每个第二通孔内,以形成多个第三着色像素 ; 以及(f)通过曝光和显影对应于形成在第一着色层中的第二通孔的第三着色辐射敏感层的位置来移除第三着色辐射敏感层,其中,处理(d')在 方法(c)和方法(d)之前或方法(d)之后和方法(e)之前,第一着色组合物含有着色剂和树脂,着色剂的含量为60质量% 更多地基于第一着色组合物的总固体,并且具有最高固体酸值的树脂的固体酸值为80mg KOH / g以下。