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    • 1. 发明申请
    • METHOD AND SYSTEM FOR TESTING A SEMICONDUCTOR DEVICE AGAINST ELECTROSTATIC DISCHARGE
    • 用于测试静电放电的半导体器件的方法和系统
    • WO2014057301A1
    • 2014-04-17
    • PCT/IB2012/002333
    • 2012-10-10
    • FREESCALE SEMICONDUCTOR, INC.SALLES, AlainBESSE, PatriceCOMPAING, StéphaneDEBOSQUE, Philippe
    • SALLES, AlainBESSE, PatriceCOMPAING, StéphaneDEBOSQUE, Philippe
    • G01R31/28G01R31/3183G01R31/3181
    • G01R31/26G01R1/0416G01R31/001G01R31/002
    • A method of testing a semiconductor device (IC) against electrostatic discharge is described. The method comprises operating (30) the semiconductor device, and, while operating the semiconductor device, monitoring a functional performance of the semiconductor device. The monitoring comprises monitoring (40) one or more signal waveforms of respective one or more signals on respective one or more pins of the semiconductor device to obtain one or more monitor waveforms, and monitoring (42) one or more register values of one or more registers of the semiconductor device to obtain one or more monitor register values as function of time. The method comprises applying (44) an electrostatic discharge event to the semiconductor device while monitoring the functional performance of the semiconductor device. The method can further comprise determining (50) a functional change from the one or more monitor waveforms and the one or more monitor register values as function of time. The method can further comprise identifying (60) a root cause of the functional change from the functional change and the one or more monitor waveforms and/or the one or more monitor register values as function of time. Further, a system for testing a semiconductor device (IC) against electrostatic discharge is described.
    • 描述了一种针对静电放电测试半导体器件(IC)的方法。 该方法包括操作(30)半导体器件,并且在操作半导体器件的同时监视半导体器件的功能性能。 该监测包括在半导体器件的相应一个或多个引脚上监测(40)相应的一个或多个信号的一个或多个信号波形,以获得一个或多个监测波形,以及监测(42)一个或多个 半导体器件的寄存器,以获得作为时间的函数的一个或多个监视寄存器值。 该方法包括在监测半导体器件的功能性能的同时将(44)静电放电事件应用于半导体器件。 该方法还可以包括从一个或多个监视器波形和一个或多个监视寄存器值确定(50)功能变化,作为时间的函数。 该方法还可以包括从功能变化和一个或多个监视器波形和/或一个或多个监视寄存器值识别(60)功能变化的根本原因,作为时间的函数。 此外,描述了用于测试防静电放电的半导体器件(IC)的系统。