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    • 4. 发明申请
    • SENSOR FOR MEASURING A MAGNETIC FIELD
    • 传感器测量磁场
    • WO0013205A3
    • 2000-08-10
    • PCT/DE9902605
    • 1999-08-19
    • FORSCHUNGSZENTRUM JUELICH GMBHSCHELTEN JAKOBLEHMANN RALF
    • SCHELTEN JAKOBLEHMANN RALF
    • G01R33/00G01R33/06H01L29/82H01L43/06
    • G01R33/06H01L43/06
    • The invention relates to a sensor for measuring a magnetic field. The inventive sensor has a high level of measuring sensitivity compared to a Hall probe, comprising several electrically semiconductive layers. Said layers are arranged in the form of a power diode connected in the reverse direction, consisting of an anode layer, a cathode layer and an intrinsically conductive layer enclosed between the two. The anode layer is subdivided by insulation sections into several anode layer areas, these areas being insulated from each other. The cathode layer has an injector area on the areas opposite the insulation sections which is oppositely doped. An electron beam is formed between the injector area and the anode by applying an injection voltage to said injector area. The electron beam is distributed across the areas of the earthed anode layer areas in the form of uniform partial currents. The electron beam is diverted by a magnetic field which forms in the intrinsically conductive layer, resulting in partial currents of different strengths on the earthed anode layer areas. The magnetic field can then be evaluated by measuring these differences in strength between the partial currents.
    • 中描述了一种传感器,用于测量具有比较霍尔探头高测量灵敏度的磁场。 该传感器由多个半导电层,其被布置在交换偏置功率二极管的形式,由阳极层,阴极层和一个封闭在它们之间Eigent导电层的构成。 阳极层由多个相互绝缘的阳极层区域的绝缘部分细分。 阴极层包括在所述隔离区域的相对部分的相反掺杂的喷射器。 通过将电压施加到该喷射喷射器喷射器区域和阳极,其被分布在均匀的部分流至接地的阳极层部分的形式之间形成的电子束。 通过在电子束的本征层的磁场中发生的事件被偏转,从而导致不同尺寸的部分流至接地的阳极层的部分。 通过测量部分流的大小的差异,现有的磁场可以计算出来。