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    • 6. 发明申请
    • COUPLED MULTI-WAVELENGTH CONFOCAL SYSTEMS FOR DISTANCE MEASUREMENTS
    • 耦合多波长协调系统进行距离测量
    • WO2012170275A1
    • 2012-12-13
    • PCT/US2012/040166
    • 2012-05-31
    • EASTMAN KODAK COMPANYEYAL, Ophir
    • EYAL, Ophir
    • G01B11/14G02B21/00
    • G01B11/14G01B2210/50G02B21/0064
    • A system for measuring a distance to a substrate includes a first light source, emitting a first wavelength on a region of the substrate though a lens. A second light source emits a second wavelength region of the substrate through the lens. A first and second detector are configured to detect the first and second wavelength light reflected from the substrate. A processor is configured to compute a first response function wherein the first response function represents reflected light intensity emitted from the first light source as a function of the distance between the imaging device and substrate. A second response function represents reflected light intensity emitted from the second light source as a function of the distance between the imaging device and substrate. A ratio response function represents the ratio of the first and second response function as a function of distance between the imaging device and substrate.
    • 用于测量与衬底的距离的系统包括通过透镜在衬底的区域上发射第一波长的第一光源。 第二光源通过透镜发射基板的第二波长区域。 第一和第二检测器被配置为检测从基板反射的第一和第二波长光。 处理器被配置为计算第一响应函数,其中第一响应函数表示从第一光源发射的反射光强度作为成像装置和基板之间的距离的函数。 第二响应函数表示从第二光源发射的反射光强度作为成像装置和基板之间的距离的函数。 比率响应函数表示作为成像装置和基板之间的距离的函数的第一和第二响应函数的比率。