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    • 5. 发明申请
    • METHODS AND DEVICES FOR MEASURING RESISTANCE OF DEVICE STRUCTURES AND MATERIALS
    • 用于测量器件结构和材料电阻的方法和装置
    • WO2014046971A1
    • 2014-03-27
    • PCT/US2013/059607
    • 2013-09-13
    • CORNING INCORPORATEDSENAWIRATNE, Jayantha
    • SENAWIRATNE, Jayantha
    • G01R27/02
    • G01R31/2648
    • A method for measuring resistance of a structure is disclosed, the method comprising (a) providing a structure, (b) providing a contact pin array electrically connected to one or more resistance measuring circuits via a switch, (c) contacting the structure with the contact pin array, (d) with the switch in a first configuration, measuring, with the one or more circuits, the resistance between a first pair of pins in the contact pin array, (e) without repositioning the contact pin array relative to the structure, and with the switch in a different configuration from a configuration of an immediately previous measurement, measuring, with the one or more circuits, the resistance between a different pair of pins in the contact pin array, and (f) repeating step (e).
    • 公开了一种用于测量结构电阻的方法,所述方法包括(a)提供一种结构,(b)提供通过开关电连接到一个或多个电阻测量电路的接触针阵列,(c)使该结构与 接触针阵列,(d)开关处于第一配置,用所述一个或多个电路测量所述接触针阵列中的第一对引脚之间的电阻,(e)不相对于所述接触针阵列重新定位所述接触针阵列 结构,并且开关处于不同于紧接之前测量的配置的不同配置,用一个或多个电路测量接触针阵列中的一对不同引脚之间的电阻,以及(f)重复步骤(e )。