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    • 4. 发明申请
    • METHOD TO ACQUIRE A 3D IMAGE OF A SAMPLE STRUCTURE
    • WO2023072557A1
    • 2023-05-04
    • PCT/EP2022/077969
    • 2022-10-07
    • CARL ZEISS SMT GMBHCARL ZEISS X-RAY MICROSCOPY INC.
    • PICHUMANI, RamaniGRAF VOM HAGEN, Christoph HilmarNEUMANN, Jens TimoRUOFF, JohannesGREGORICH, Thomas Matthew
    • G01N23/046G06T11/00
    • In a method to acquire a 3D image of a sample structure initially a first raw 2D set of 2D images of a sample structure is acquired at a limited number of raw sample planes. From this first raw 2D set a 3D image of the sample structure being represented by a 3D volumetric image data set is calculated and a measurement parameter is extracted from the 3D volumetric image data set. Such measurement parameter is assigned to the number of 2D image acquisitions recorded during the acquisition step. Then, a further interleaving 2D set of 2D images of the sample structure is required by recording a further number of interleaving 2D image acquisitions at a further number of interleaved sample planes which do not coincide with the previous acquisition sample planes. The steps "calculating," "extracting" and "assigning" are repeated for the further interleaving 2D set. The actual and the last extracted measurement parameters are compared to check whether a convergence criterion is met. If not, the steps "acquiring," "calculating," "extracting," "assigning" and "comparing" are repeated for a further interleaving 2D set including a further number of interleaving 2D image acquisitions at a further number of interleaved sample planes which do not coincide with the previous acquisition sample planes. This is done until the convergence criterion is met or until a given maximum number of 2D image acquisitions is recorded. The measurement parameter and a total number of recorded 2D image acquisitions are output. A projection system used for such method comprises a projection light source, a rotatable sample structure holder and a spatially resolving detector. Alternatively or in addition, such method can be used by a data processing system to acquire virtual tomographic images of a sample. With such method, a sample throughput is improved.