专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2005050325A1 POLARIZATION-OPTIMIZING ILLUMINATION SYSTEM 审中-公开
标题翻译：极化优化照明系统
公开(公告)号：WO2005050325A1
公开(公告)日：2005-06-02
申请号：PCT/EP2004/012398
申请日：2004-11-03
申请人： CARL ZEISS SMT AG , KOEHLER, Jess , FIOLKA, Damian
发明人： KOEHLER, Jess , FIOLKA, Damian
IPC分类号： G03F7/20
CPC分类号： G03F7/70066 , G03F7/70566
摘要： An illumination system for a projection exposure installation for microlithography, in particular for a wafer scanner, for illuminating an illumination field on an outlet plane (53) of the illumination system with the light from a light source (2) has, within an imaging system (15) which images an intermediate field plane (13) on the outlet plane (53), a polarization conversion device (22) having a large number of polarization rectifier elements for producing a defined polarization state of the light emerging from the illumination system. The use of the polarization conversion device (22) allows the polarization state of the illumination light to be matched to the polarization state which is required in the downstream projection objective (51) without a significant proportion of the light injected from the light source into the illumination system being lost during the production of this polarization state.
摘要翻译：用于微光学的投影曝光装置的照明系统，特别是用于晶片扫描器的照明系统，用于利用来自光源（2）的光照射照明系统的出口平面（53）上的照明场，在照相系统（15），其在出射平面（53）上成像中间场平面（13）;偏振转换装置（22），其具有大量的偏振整流元件，用于产生从照明系统出射的光的限定的偏振状态。偏振转换装置（22）的使用允许照明光的偏振状态与下游投影物镜（51）中所需的偏振状态相匹配，而从光源注入的光的大部分不会照明系统在该极化状态的产生期间丢失。

2. 发明申请

WO2003023521A1 A ZOOM SYSTEM, IN PARTICULAR, A ZOOM SYSTEM FOR AN ILLUMINATION DEVICE OF A MICROLITHOGRAPHIC PROJECTION SYSTEM 审中-公开
标题翻译：变焦系统，特别是用于微晶投影系统的照明装置的变焦系统
公开(公告)号：WO2003023521A1
公开(公告)日：2003-03-20
申请号：PCT/EP2002/009665
申请日：2002-08-30
申请人： CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG , KOEHLER, Jess
发明人： KOEHLER, Jess
IPC分类号： G03F7/20
CPC分类号： G03F7/70183 , G02B13/143 , G02B13/22 , G02B15/173 , G03F7/70075
摘要： A zoom system that is particularly suited to use on an illumination device of a microlithographic projection exposure system and is configured in the form of a focal-length-zooming lens is disclosed. The lenses of the zoom system define an object plane (6) and an image plane (8) that is a Fourier transform of the object plane. Both an intermediate pupillary plane (25) that is conjugate to the image plane and an intermediate field plane (27) that is a Fourier transform of the image plane lie between the object plane (6) and image plane (8). At least one movable lens (31, 32) is arranged in the vicinity of these intermediate image planes (25, 27). The system is characterized by a large expansion of the illuminated area on the image plane for short lengths of travel and light weights of these movable lenses (31, 32).
摘要翻译：公开了一种特别适合于在微光刻投影曝光系统的照明装置上使用并且被配置为焦距变焦透镜形式的变焦系统。变焦系统的透镜定义物体平面（6）和作为物平面的傅里叶变换的图像平面（8）。与图像平面共轭的中间瞳孔平面（25）和作为图像平面的傅立叶变换的中间场平面（27）位于物平面（6）和图像平面（8）之间。在这些中间图像平面（25,27）附近布置有至少一个可移动透镜（31,32）。该系统的特征在于，对于这些可移动透镜（31,32）的短行程和轻重量，图像平面上的照明区域的扩大很大。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式