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    • 2. 发明申请
    • X-RAY SOURCE WITH NONPARALLEL GEOMETRY
    • X射线源与非对称几何
    • WO2005119730A2
    • 2005-12-15
    • PCT/US2005/018156
    • 2005-05-23
    • CABOT MICROELECTRONICS CORPORATION
    • LESIAK, StanleyBUSTA, HeinzZWICKER, Bruce
    • H01J35/00
    • H01J35/065G21K5/02H01J35/08H01J2235/062H01J2235/068H01J2235/086H01J2235/163
    • An improved x-ray generation system produces a converging or diverging radiation pattern particularly suited for substantially cylindrical or spherical treatment devices. In an embodiment, the system comprises a closed or concave outer wall about a closed or concave inner wall. An electron emitter is situated on the inside surface of the outer wall, while a target film is situated on the outside surface of the inner wall. An extraction voltage at the emitter extracts electrons which are accelerated toward the inner wall by an acceleration voltage. Alternately, electron emission may be by thermionic means. Collisions of electrons with the target film causes x-ray emission, a substantial portion of which is directed through the inner wall into the space defined within. In an embodiment, the location of the emitter and target film are reversed, establishing a reflective rather than transmissive mode for convergent patterns and a transmissive mode for divergent patterns.
    • 改进的x射线产生系统产生特别适用于大致圆柱形或球形处理装置的会聚或发散辐射图。 在一个实施例中,系统包括围绕封闭或凹入的内壁的封闭或凹入的外壁。 电子发射体位于外壁的内表面上,而靶膜位于内壁的外表面上。 发射极处的提取电压提取通过加速电压向内壁加速的电子。 或者,电子发射可以通过热电子方式。 电子与目标膜的碰撞导致x射线发射,其大部分被引导通过内壁进入限定在其内的空间。 在一个实施例中,发射器和目标膜的位置被反转,建立用于会聚图案的反射而不是透射模式和用于发散图案的透射模式。