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1. 发明申请

WO2021156121A1 CHARGED PARTICLE MANIPULATOR DEVICE 审中-公开
公开(公告)号：WO2021156121A1
公开(公告)日：2021-08-12
申请号：PCT/EP2021/051848
申请日：2021-01-27
申请人： ASML NETHERLANDS B.V.
发明人： BRANDT, Pieter, Lucas , WIELAND, Marco, Jan-Jaco
IPC分类号： H01J37/153
摘要： A multi-beam manipulator device operates on sub-beams of a multi-beam to deflect the subbeam paths. The device comprises: an electrode as pairs of parallel surfaces. Each pair of parallel surfaces comprises a first surface that is arranged along a side of a corresponding line of sub-beams and a second surface that is arranged parallel to the first surface and along an opposite side of the corresponding line of sub-beam paths. A first pair of parallel surfaces is configured to electrostatically interact with an entire line of sub-beams in the multi-beam so that it is capable of applying a deflection amount to the paths of sub-beams in a first direction. A second pair of parallel surfaces is configured to electro-statically interact with an entire line of sub-beams in the multi-beam so that it is capable of applying another deflection amount to the paths of sub-beams in a second direction.

2. 发明申请

WO2021170482A1 ELECTROSTATIC LENS DESIGNS 审中-公开
公开(公告)号：WO2021170482A1
公开(公告)日：2021-09-02
申请号：PCT/EP2021/054008
申请日：2021-02-18
申请人： ASML NETHERLANDS B.V.
发明人： DEL TIN, Laura , STEGEMANN, Almut, Johanna , AKSENOV, German , MARTINEZ NEGRETE GASQUE, Diego , BRANDT, Pieter, Lucas
IPC分类号： H01J37/10 , H01J37/12
摘要： Disclosed herein is a manipulator lensing device for focusing a beam of charged particles, wherein the manipulator lensing device comprises a first structure (401) through which is formed an opening, wherein the path of the beam is substantially along a longitudinal axis of the opening, a second structure (402) with a surface (406) surrounding the opening, a support (403) that connects the second structure to the first structure and surrounds the second structure, and an electrode arrangement (407) provided on the surface (406) of the second structure, wherein a first surface (404) of the first structure (401) surrounds the opening, a second surface (405) of the first structure (401) surrounds the opening, the surface (406) of the second structure (402) being arranged along the longitudinal axis between the first and second surfaces of the first structure, the electrode arrangement (407) and each of the first (404) and second (405) surfaces of the first structure (401) are separated from each other by a respective gap in a direction parallel to the longitudinal axis, wherein, along the longitudinal axis, the extent of the support (403) is less than the extent of the surface (406) of the second structure and/or electrode arrangement (407). Further disclosed is a multi-array lens configured focus a plurality of beamlets of charged particles along a multi-beam path, wherein each lens in the array comprises said manipulator lensing device.

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