专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2010129430A1 SMART TEMPERATURE MEASURING DEVICE 审中-公开
标题翻译：智能温度测量装置
公开(公告)号：WO2010129430A1
公开(公告)日：2010-11-11
申请号：PCT/US2010/033248
申请日：2010-04-30
申请人： ASM AMERICA, INC. , AGGARWAL, Ravinder K. , CONNER, Rand
发明人： AGGARWAL, Ravinder K. , CONNER, Rand
IPC分类号： G01K7/02 , G01K1/20 , G01K1/00 , H01L21/66 , G05D23/22 , G05D23/19
CPC分类号： G01K7/02 , G01K1/02 , G05D23/1931 , G05D23/22
摘要： A temperature measuring device having a smart chip, or electronic circuit, integrated therein is provided. The smart chip, or electronic circuit, includes at least a unique identification number or data specific to the particular temperature measuring device stored thereon. The electronic circuit further includes calibration data of the temperature measuring device stored thereon. A module controller of a temperature control system is configured to verify the unique identification number of the thermocouple assembly prior to allowing data to be transferred between the temperature measuring device and a temperature controller. A graphical user interface allows an operator to enter the unique identification number or data to verify the temperature measuring device and display an error message if the number or data entered is not equivalent, or does not match, the unique identification number or data stored on the electronic circuit.
摘要翻译：提供一种具有集成在其中的智能芯片或电子电路的温度测量装置。智能芯片或电子电路至少包括唯一的识别号码或特定于其上存储的特定温度测量装置的数据。电子电路还包括存储在其上的温度测量装置的校准数据。温度控制系统的模块控制器被配置为在允许在温度测量装置和温度控制器之间传送数据之前验证热电偶组件的唯一标识号。图形用户界面允许操作员输入唯一的标识号或数据来验证温度测量装置，并且如果输入的数字或数据不等同于或不匹配存储在电子电路。

2. 发明申请

WO2010129431A2 THERMOCOUPLE 审中-公开
标题翻译：热电偶
公开(公告)号：WO2010129431A2
公开(公告)日：2010-11-11
申请号：PCT/US2010/033252
申请日：2010-04-30
申请人： ASM AMERICA, INC. , CONNER, Rand , AGGARWAL, Ravinder, K.
发明人： CONNER, Rand , AGGARWAL, Ravinder, K.
IPC分类号： H01L21/683 , G01K7/02 , G01K1/08 , H01L21/304 , C23C16/00
CPC分类号： H01L21/67248 , C23C16/4586 , G01K1/14 , G01K7/02
摘要： A thermocouple having at least one inner alignment feature or at least one outer alignment feature, or a combination thereof for positively positioning and aligning at least one thermocouple junction within a bore formed in a susceptor ring of a semiconductor substrate processing reactor. The outer alignment feature is configured to positively align the junction(s) longitudinally within the bore. The inner alignment feature configured to positively position the junction(s) rotationally within the sheath of the thermocouple relative to the bore.
摘要翻译：具有至少一个内部对准特征或至少一个外部对准特征或其组合的热电偶用于在半导体衬底处理反应器的基座环内形成的孔内积极地定位和对准至少一个热电偶结。外部对准特征构造成在孔内纵向对准接头。所述内部对准特征构造成相对于所述孔将所述接合部在所述热电偶的护套内旋转地定位。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式