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    • 5. 发明申请
    • POLYCRYSTALLINE SILICON INGOT PRODUCTION DEVICE PROVIDED WITH A ROTATING DOOR OPENING AND SHUTTING DEVICE
    • 具有旋转门开启和切断装置的多晶硅锭生产装置
    • WO2011037343A3
    • 2011-07-14
    • PCT/KR2010006183
    • 2010-09-10
    • GLOSIL INCKIM HAN SUNG
    • KIM HAN SUNG
    • C30B21/02C30B35/00
    • C30B29/06C30B11/003C30B11/006C30B35/00
    • The present invention is a polycrystalline silicon ingot production device comprising a vacuum chamber, a crucible, a heater, a susceptor, a cooling plate, a door opening and shutting device which is provided between the crucible and the cooling plate and restricts the release of heat in order to melt or grow silicon, a temperature sensor and a control unit which receives the output value of the temperature sensor and controls the temperature inside the crucible such that the silicon inside the crucible is melted and uniformly grown; wherein the door opening and shutting device consists of a first door and a second door which are formed with an opening a predetermined interval apart, and incorporates a drive unit for selectively opening and shutting the opening through relative rotation between the first door and the second door.
    • 本发明是一种多晶硅锭生产装置,其包括设置在坩埚和冷却板之间并限制热量释放的真空室,坩埚,加热器,基座,冷却板,门开闭装置 以便熔化或生长硅;温度传感器和控制单元,其接收温度传感器的输出值并控制坩埚内的温度,使得坩埚内的硅被熔化并均匀生长; 其中所述门开闭装置包括第一门和第二门,所述第一门和所述第二门以预定间隔分开地形成有开口,并且结合有驱动单元,所述驱动单元用于通过所述第一门和所述第二门之间的相对旋转选择性地打开和关闭所述开口 。