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1. 发明申请

WO2005026688A2 SAMPLING MANAGEMENT FOR A PROCESS ANALYSIS TOOL TO MINIMIZE SAMPLE USAGE AND DECREASE SAMPLING TIME 审中-公开
标题翻译：采样管理用于过程分析工具以最小化采样和减少采样时间
公开(公告)号：WO2005026688A2
公开(公告)日：2005-03-24
申请号：PCT/US2004/028876
申请日：2004-09-07
申请人： ADVANCED TECHNOLOGY MATERIALS, INC. , KING, Mackenzie, E. , CHATTERTON, Thomas , BHELLA, Richard
发明人： KING, Mackenzie, E. , CHATTERTON, Thomas , BHELLA, Richard
IPC分类号： G01N
CPC分类号： G01N35/1097 , C25D21/12 , G01N2001/205 , Y10T436/118339
摘要： A method and system for analysis of additives in electrolysis plating solutions, using a flow management system that minimizes loss of plating solutions and decreases sampling time. The system includes at least one analysis chamber, a sampling duct connected to processing tool, a four-way valve positioned between the processing tool and the sampling duct, at least one carrier fluid duct connected to the analysis chamber, at least one actuatable multi-port valve that provides a transference platform between the sampling duct and the at least one carrier fluid duct, and a flow sensor connected to the sampling duct and positioned downstream from the at least one actuatable multi-port valve.
摘要翻译：一种用于分析电解电镀溶液中添加剂的方法和系统，其使用流动管理系统，其使电镀溶液的损失最小化并且减少采样时间。该系统包括至少一个分析室，连接到处理工具的采样管道，位于处理工具和采样管道之间的四通阀，连接到分析室的至少一个载体流体管道，至少一个可致动的多通道管道，在取样管道和至少一个载体流体管道之间提供转移平台的端口阀门以及连接到取样管道并位于至少一个可致动多端口阀门下游的流量传感器。

2. 发明申请

WO2003106990A1 METHOD FOR DETERMINING CONCENTRATIONS OF ADDITIVES IN ACID COPPER ELECTROCHEMICAL DEPOSITION BATHS 审中-公开
标题翻译：用于确定酸性电化学沉积物中添加剂浓度的方法
公开(公告)号：WO2003106990A1
公开(公告)日：2003-12-24
申请号：PCT/US2003/017568
申请日：2003-06-04
申请人： ADVANCED TECHNOLOGY MATERIALS, INC.
发明人： HAN, Jianwen , ETTERMAN, Ronni, M. , ROBERTSON, Peter, M. , BHELLA, Richard , PRICE, David
IPC分类号： G01N27/42
CPC分类号： G01N27/4161 , G01N27/42
摘要： The present invention relates to a method for determining concentration of brightener and leveler contained in an aqueous acid metal electroplating solution, which minimizes the interference between the effects of the brightener and the effects of the leveler, by firstly determining the concentration of the brightener at a first set of measurement conditions, and secondly determining the concentration of the leveler at a second set of measurement conditions, provided that the first set of measurement conditions differ from the second set of measurement conditions on either (1) the rotation speed of a rotating disc electrode used for measuring plating potential of said aqueous acid metal electroplating solution, or (2) the electroplating duration at which the plating potential of said aqueous acid metal electroplating solution is measured, such that the rotation speed of the first set of measurement conditions is lower than the rotation speed of the second set of measurement conditions, and that the electroplating duration of the first set of measurement conditions is shorter than that of the second set of measurement conditions.
摘要翻译：本发明涉及一种用于测定含水酸性金属电镀溶液中的增白剂和矫正剂浓度的方法，其通过首先确定增白剂的浓度来最小化增白剂的作用和矫味剂的影响之间的干扰第一组测量条件，其次在第二组测量条件下确定矫直机的浓度，条件是第一组测量条件与第二组测量条件不同，（1）旋转盘的旋转速度用于测量所述含水酸性金属电镀溶液的电镀电位的电极，或（2）测量所述酸性金属电镀溶液的电镀电位的电镀持续时间，使得第一组测量条件的转速较低比第二组测量条件的转速高，并且第一组测量条件的电镀持续时间比第二组测量条件的电镀持续时间短。

3. 发明申请

WO2011035008A2 VESSEL INCORPORATING FILM WITH ENHANCED ANTI-STATIC PROPERTIES AND RELATED METHODS 审中-公开
标题翻译：装有增强抗静电性能的膜和相关方法
公开(公告)号：WO2011035008A2
公开(公告)日：2011-03-24
申请号：PCT/US2010/049098
申请日：2010-09-16
申请人： ADVANCED TECHNOLOGY MATERIALS, INC. , ATMI NV , PETHE, Vishwas , BHELLA, Richard , VANHAMEL, Steven , MEESTERS, Els
发明人： PETHE, Vishwas , BHELLA, Richard , VANHAMEL, Steven , MEESTERS, Els
IPC分类号： B32B27/00
CPC分类号： B32B27/32 , B32B1/02 , B32B7/02 , B32B27/08 , B32B27/18 , B32B27/20 , B32B2250/24 , B32B2270/00 , B32B2307/21 , B32B2307/412 , B32B2307/546 , B32B2439/06 , B32B2439/46 , B32B2439/80 , Y10T428/31913
摘要： An apparatus for use in material processing takes the form of a vessel including a wall at least partially formed of a flexible film. The film includes at least two layers having an anti-static agent and sandwiching an intermediate layer. Related methods are also disclosed.
摘要翻译：用于材料加工的设备采用包括至少部分由柔性膜形成的壁的容器的形式。该膜包括至少两层具有抗静电剂并夹住中间层的层。还披露了相关的方法。

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