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    • 3. 发明申请
    • THIN FILM CERAMIC THERMOCOUPLES
    • 薄膜陶瓷热电偶
    • WO2005112140A2
    • 2005-11-24
    • PCT/US2005012004
    • 2005-04-12
    • RHODE ISLAND EDUCATIONGREGORY OTTOFRALICK GUSTAVEWRBANEK JOHNYOU TAO
    • GREGORY OTTOFRALICK GUSTAVEWRBANEK JOHNYOU TAO
    • H01L35/28
    • G01K7/04G01K7/028
    • A thin film ceramic thermocouple (10) having two ceramic thermocouple (12, 14) that are in contact with each other in at least on point to form a junction, and wherein each element was prepared in a different oxygen/nitrogen/argon plasma. Since each element is prepared under different plasma conditions, they have different electrical conductivity and different charge carrier concentration. The thin film thermocouple (10) can be transparent. A versatile ceramic sensor system having an RTD heat flux sensor can be combined with a thermocouple and a strain sensor to yield a multifunctional ceramic sensor array. The transparent ceramic temperature sensor that could ultimately be used for calibration of optical sensors.
    • 一种具有两个陶瓷热电偶(12,14)的薄膜陶瓷热电偶(10),它们至少在至少一点上彼此接触以形成结,并且其中每个元件在不同的氧/氮/氩等离子体中制备。 由于每种元素在不同的等离子体条件下制备,它们具有不同的电导率和不同的电荷载流子浓度。 薄膜热电偶(10)可以是透明的。 具有RTD热通量传感器的多功能陶瓷传感器系统可以与热电偶和应变传感器组合,以产生多功能陶瓷传感器阵列。 透明陶瓷温度传感器最终可用于校准光学传感器。