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1. 发明申请

WO2007023587A1 THIN-FILM PIEZOELECTRIC RESONATOR AND FILTER CIRCUIT 审中-公开
标题翻译：薄膜压电谐振器和滤波电路
公开(公告)号：WO2007023587A1
公开(公告)日：2007-03-01
申请号：PCT/JP2006/305070
申请日：2006-03-08
申请人： KABUSHIKI KAISHA TOSHIBA , OHARA, Ryoichi , YANASE, Naoko , SANO, Kenya , YASUMOTO, Takaaki , ITAYA, Kazuhiko
发明人： OHARA, Ryoichi , YANASE, Naoko , SANO, Kenya , YASUMOTO, Takaaki , ITAYA, Kazuhiko
IPC分类号： H03H9/17
CPC分类号： H03H9/174 , H03H9/02125 , H03H9/132 , H03H9/588 , H03H9/605
摘要： A thin-film piezoelectric resonator includes: a lower electrode (11) provided on the principal surface of the substrate (10) so as to cover the cavity (14); a piezoelectric film (12) provided on the lower electrode (11) so as to be located above the cavity (14); and an upper electrode (13). The upper electrode (13) has a main portion (13a) which overlaps a part of the cavity (14), a protruding portion (13b) connected on one side to the main portion (13), a connecting portion (13c) provided at the opposite side of the main portion (13), and an extension portion (13d) connected to the connecting portion (13c). The length of the protruding portion (13b) is substantially the same as the length of the connecting portion (13c), so that the overlap area of the upper (13) and lower (11) electrodes outside the cavity region is constant with respect to a shift of the cavity (14) location. As a result, the total sum of the parasitic capacitances in the upper (13) and lower (11) electrodes facing each other outside the cavity (14) does not vary with a shift of the cavity (14) location.
摘要翻译：薄膜压电谐振器包括：设置在基板（10）的主表面上以覆盖空腔（14）的下电极（11）; 设置在所述下电极（11）上以便位于所述空腔（14）上方的压电薄膜（12）。和上电极（13）。上电极（13）具有与空腔（14）的一部分重叠的主体部（13a），与主体部（13）一体连接的突出部（13b），连接部主要部分（13）的相对侧，以及连接到连接部分（13c）的延伸部分（13d）。突出部分（13b）的长度与连接部分（13c）的长度基本相同，使得在空腔区域之外的上部（13）和下部（11）电极的重叠面积相对于空腔（14）位置的移动。结果，在空腔（14）外部彼此面对的上部（13）和下部（11）电极中的寄生电容的总和不随空腔（14）位置的移动而变化。

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