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    • 5. 发明申请
    • ADHESION LAYERS IN NANOIMPRINT LITHOGRAPHY
    • NANOIMPRINT LITHOGRAPHY粘合层
    • WO2011066450A2
    • 2011-06-03
    • PCT/US2010058089
    • 2010-11-24
    • MOLECULAR IMPRINTS INCYE ZHENGMAOXU FRANK YLABRAKE DWAYNE LSELINIDIS KOSTA S
    • YE ZHENGMAOXU FRANK YLABRAKE DWAYNE LSELINIDIS KOSTA S
    • G03F7/00
    • G03F7/0002B82Y10/00B82Y40/00Y10T428/265
    • Forming an adhesive layer on a nanoimprint lithography template or a double-sided disk. Forming the adhesive layer on the double-sided disk includes immersing the double-sided disk in a liquid adhesive composition and removing the double-sided disk from the adhesive composition. The outer layer of the double-sided disk is a carbon overcoating or an intermediate layer. The adhesive composition is dried to form a first adhesion layer adhered directly to the carbon overcoating or intermediate layer on a first side of the disk and a second adhesion layer adhered directly to the carbon overcoating or intermediate layer on a second side of the disk. Forming the adhesive layer on the nanoimprint lithography template includes applying an adhesive material to the template, allowing the template to remain motionless, and rinsing a portion of the adhesive material from the template with a solvent, and drying the template.
    • 在纳米压印光刻模板或双面盘上形成粘合剂层。 在双面盘上形成粘合剂层包括将双面盘浸入液体粘合剂组合物中并从粘合剂组合物中除去双面盘。 双面盘的外层是碳外涂层或中间层。 将粘合剂组合物干燥以形成直接附着在盘的第一侧上的碳外涂层或中间层的第一粘合层,以及直接粘附在盘的第二侧上的碳外涂层或中间层的第二粘附层。 在纳米压印光刻模板上形成粘合剂层包括将粘合剂材料施加到模板上,允许模板保持静止,并用溶剂从模板中漂洗一部分粘合剂材料,并干燥模板。