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    • 3. 发明申请
    • A PREFERENTIAL CRYSTAL ETCHING TECHNIQUE FOR THE FABRICATION OF MILLIMETER AND SUBMILLIMETER WAVELENGTH HORN ANTENNAS
    • 用于制造米勒和低密度波长天线的优选水晶蚀刻技术
    • WO9847198A2
    • 1998-10-22
    • PCT/US9805831
    • 1998-03-25
    • UNIV VIRGINIAKOH PHILIP JCROWE THOMAS WHESLER JEFFREY LWOOD PERRYBISHOP WILLIAMWEIKLE ROBERT M
    • KOH PHILIP JCROWE THOMAS WHESLER JEFFREY LWOOD PERRYBISHOP WILLIAMWEIKLE ROBERT M
    • B81C1/00H01Q13/02H01Q
    • B81C1/00404H01Q13/0283
    • A horn antenna including first and second substrates having at least one first and at least one second horn shaped cavity formed in the first and second substrates, respectively. The horn shaped cavities taper from a narrow end and have a longitudinal axis along a plane parallel to a top surface of the first and second substrates. The second horn shaped cavity is disposed opposite the first horn shaped cavity and is a mirror image of the first horn shaped cavity. Internal surfaces of the first and second horn shaped cavities include a metalization layer. The horn antenna is fabricated by forming at least one mask having a longitudinally extending mask opening on the first and second substrates and preferentially etching the first and second substrate through the mask opening to form the first and second horn shaped cavities. A final shape of the first and second cavities is determined by the shape of the mask opening and the etching time which may be less than the time required to etch the first and second substrates to completion depending on the desired shape of the horn aperture.
    • 喇叭天线包括分别形成在第一和第二基板中的至少一个第一和至少一个第二喇叭形空腔的第一和第二基板。 喇叭状空腔从窄端逐渐变细,并且沿着平行于第一和第二基板的顶表面的平面具有纵向轴线。 第二喇叭形空腔与第一喇叭形空腔相对设置,并且是第一喇叭形空腔的镜像。 第一和第二喇叭形空腔的内表面包括金属化层。 喇叭天线通过在第一和第二基板上形成具有纵向延伸的掩模开口的至少一个掩模来制造,并且优选地通过掩模开口蚀刻第一和第二基板以形成第一和第二喇叭形空腔。 第一和第二空腔的最终形状由掩模开口的形状和蚀刻时间决定,该蚀刻时间可能小于根据喇叭孔的期望形状来蚀刻第一和第二基底至完成所需的时间。