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1. 发明申请

WO2004028953B1 MICROELECTROMECHANICAL DEVICE HAVING AN ACTIVE OPENING SWITCH 审中-公开
标题翻译：具有有源开关开关的微电子器件
公开(公告)号：WO2004028953B1
公开(公告)日：2005-08-11
申请号：PCT/US0331239
申请日：2003-09-30
申请人： TERAVICTA TECHNOLOGIES INC
发明人： NELSON RICHARD D
IPC分类号： H01H59/00 , B81B3/00 , H01H1/00
CPC分类号： B81B3/0054 , B81B2201/014 , H01H59/0009
摘要： A microelectromechanical device is provided which includes a beam configured to apply an opening force on a closed switch. The opening force may be substantially independent of a force stored in the closed switch. A combination of the force applied by the beam and the force stored in the closed switch may be sufficient to open the switch after removal of a force associated with actuation of the switch. Another micro-electromechanical device includes a switch beam spaced above a closing gate and a contact structure. The device may also include an additional beam configured to apply a force on the switch beam in a direction away from the contact structure. A method for opening a switch includes reducing an attractive force between a switch beam and a closing gate. The method also includes externally applying a mechanical force on the switch beam in a direction away from the closing gate.
摘要翻译：提供了一种微机电装置，其包括被构造成在闭合的开关上施加开启力的梁。打开力可以基本上独立于存储在闭合开关中的力。由梁施加的力与存储在闭合开关中的力的组合可能足以在移除与开关的致动相关联的力之后打开开关。另一微机电装置包括在关闭门上方间隔开的开关梁和接触结构。该装置还可以包括被配置成沿远离接触结构的方向在开关梁上施加力的附加梁。用于打开开关的方法包括减小开关束和关闭门之间的吸引力。该方法还包括在离开关闭门的方向上向开关梁外部施加机械力。

2. 发明申请

WO2004028953A2 MICROELECTROMECHANICAL DEVICE HAVING AN ACTIVE OPENING SWITCH 审中-公开
标题翻译：具有有源开关开关的微电子器件
公开(公告)号：WO2004028953A2
公开(公告)日：2004-04-08
申请号：PCT/US0331239
申请日：2003-09-30
申请人： TERAVICTA TECHNOLOGIES INC
发明人： NELSON RICHARD D
IPC分类号： H01H59/00 , B81B
CPC分类号： B81B3/0054 , B81B2201/014 , H01H59/0009
摘要： A microelectromechanical device is provided which includes a beam configured to apply an opening force on a closed switch. The opening force may be substantially independent of a force stored in the closed switch. A combination of the force applied by the beam and the force stored in the closed switch may be sufficient to open the switch after removal of a force associated with actuation of the switch. Another micro-electromechanical device includes a switch beam spaced above a closing gate and a contact structure. The device may also include an additional beam configured to apply a force on the switch beam in a direction away from the contact structure. A method for opening a switch includes reducing an attractive force between a switch beam and a closing gate. The method also includes externally applying a mechanical force on the switch beam in a direction away from the closing gate.
摘要翻译：提供了一种微机电装置，其包括被构造成在闭合的开关上施加开启力的梁。打开力可以基本上独立于存储在闭合开关中的力。由梁施加的力与存储在闭合开关中的力的组合可能足以在移除与开关的致动相关联的力之后打开开关。另一微机电装置包括在关闭门上方间隔开的开关梁和接触结构。该装置还可以包括被配置成沿远离接触结构的方向在开关梁上施加力的附加梁。用于打开开关的方法包括减小开关束和关闭门之间的吸引力。该方法还包括在离开关闭门的方向上向开关梁外部施加机械力。

3. 发明申请

WO2006023809A1 MEMS SWITCH ELECTRODE CONFIGURATION TO INCREASE SIGNAL ISOLATION 审中-公开
标题翻译： MEMS开关电极配置增加信号隔离
公开(公告)号：WO2006023809A1
公开(公告)日：2006-03-02
申请号：PCT/US2005/029693
申请日：2005-08-19
申请人： TERAVICTA TECHNOLOGIES, INC. , GOINS, David, A.
发明人： GOINS, David, A.
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01G5/18
摘要： A microelectromechanical system (MEMS) switch is provided which includes a moveable electrode (32) with an opening (49) arranged over at least a portion of the signal trace (28). In some cases, the opening may include a notch (34) arranged along a periphery of the moveable electrode. In particular, the opening may include a notch bound by two edges of the moveable electrode which are respectively arranged relative to opposing sides of the signal trace. In other embodiments, the opening may include a hole arranged interior to the peripheral edge of the moveable electrode. In some cases, the MEMS switch may include a plurality of contact structures coupled to signal traces. In such cases, the moveable electrode may include openings specifically arranged above a plurality of the signal traces.
摘要翻译：提供了一种微机电系统（MEMS）开关，其包括具有布置在信号迹线（28）的至少一部分上的开口（49）的可移动电极（32）。在一些情况下，开口可以包括沿着可移动电极的周边布置的凹口（34）。特别地，开口可以包括由可移动电极的两个边缘限定的凹口，其相对于信号迹线的相对侧分别布置。在其他实施例中，开口可以包括布置在可移动电极的周边边缘内部的孔。在一些情况下，MEMS开关可以包括耦合到信号迹线的多个接触结构。在这种情况下，可移动电极可以包括特别布置在多个信号迹线上方的开口。

4. 发明申请

WO2006023724A1 PLATE-BASED MICROELECTROMECHANICAL SWITCH HAVING A THREE-FOLD RELATIVE ARRANGEMENT OF CONTACT STRUCTURES AND SUPPORT ARMS 审中-公开
标题翻译：具有接触结构和支撑臂的三维相对布置的基于板的微电子开关
公开(公告)号：WO2006023724A1
公开(公告)日：2006-03-02
申请号：PCT/US2005/029557
申请日：2005-08-19
申请人： TERAVICTA TECHNOLOGIES, INC. , NELSON, Richard, D. , FLYNN, William, G. , GOINS, David, A.
发明人： NELSON, Richard, D. , FLYNN, William, G. , GOINS, David, A.
IPC分类号： H01H59/00
CPC分类号： H01H59/0009
摘要： A microelectromechanical system (MEMS) switch is provided which includes a multiple of three support arms extending from the periphery of a moveable electrode. In addition, MEMS switch includes a plurality of contact structures having portions extending into a space between a fixed electrode and the moveable electrode. In some cases, the relative arrangement of the support arms and the contact structures are congruent among three regions of the MEMS switch which collectively comprise the entirety of the fixed electrode and the entirety of the moveable electrode. In other embodiments, the contact structures may not be arranged congruently within the MEMS switch.
摘要翻译：提供了一种微机电系统（MEMS）开关，其包括从可移动电极的周边延伸的三个支撑臂的多个。此外，MEMS开关包括多个接触结构，其具有延伸到固定电极和可移动电极之间的空间的部分。在一些情况下，支撑臂和接触结构的相对布置在MEMS开关的三个区域中是一致的，它们共同地包括整个固定电极和整个可移动电极。在其他实施例中，接触结构可以不一致地布置在MEMS开关内。

5. 发明申请

WO2007022500B1 MICROELECTROMECHANICAL SWITCHES HAVING MECHANICALLY ACTIVE COMPONENTS WHICH ARE ELECTRICALLY ISOLATED FROM COMPONENTS OF THE SWITCH USED FOR THE TRANSMISSION OF SIGNALS 审中-公开
标题翻译：微机电开关具有机械有源元件，电气隔离开关用于传输信号
公开(公告)号：WO2007022500B1
公开(公告)日：2007-06-28
申请号：PCT/US2006032567
申请日：2006-08-18
申请人： TERAVICTA TECHNOLOGIES INC , YEE IAN Y K , FLYNN WILLIAM G
发明人： YEE IAN Y K , FLYNN WILLIAM G
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H2059/0072
摘要： A plate-based microelectromechanical system (MEMS) switch (20) is provided which includes a moveable plate (22) suspended above a substrate and a plurality of arms (36) extending from the periphery of the moveable plate (22) . The moveable plate includes a first electrode suspended over a second electrode arranged on the substrate and a first input/output signal contact structure electrically isolated from the first electrode. In some embodiments, the first input/output signal contact structure is arranged proximate to the edge of the moveable plate (22) . In addition or alternatively, one of the arms (36) is electrically coupled to the first input/output signal contact structure and comprises an input/output signal trace. A cantilever-based MEMS switch is provided which includes a cantilever structure with a first electrode suspended (over) a second electrode arranged upon a substrate. In addition, the cantilever structure includes an input/output signal line spaced apart from the first electrode and arranged above an input/output signal contact structure.
摘要翻译：提供了一种基于板的微机电系统（MEMS）开关（20），其包括悬挂在衬底上方的可移动板（22）和从可移动板（22）的周边延伸的多个臂（36）。可移动板包括悬置在布置在衬底上的第二电极上的第一电极以及与第一电极电隔离的第一输入/输出信号接触结构。在一些实施例中，第一输入/输出信号触点结构布置为靠近可移动板（22）的边缘。另外或可选地，臂（36）中的一个电耦合到第一输入/输出信号触点结构并且包括输入/输出信号迹线。提供了一种基于悬臂的MEMS开关，其包括悬臂结构，该悬臂结构具有悬置（布置在）布置在衬底上的第二电极的第一电极。另外，悬臂结构包括输入/输出信号线，该输入/输出信号线与第一电极隔开并且布置在输入/输出信号触点结构之上。

6. 发明申请

WO2007022500A3 MICROELECTROMECHANICAL SWITCHES HAVING MECHANICALLY ACTIVE COMPONENTS WHICH ARE ELECTRICALLY ISOLATED FROM COMPONENTS OF THE SWITCH USED FOR THE TRANSMISSION OF SIGNALS 审中-公开
标题翻译：具有用于传输信号的开关的组件电动分离的机械有源部件的微电子机电开关
公开(公告)号：WO2007022500A3
公开(公告)日：2007-05-24
申请号：PCT/US2006032567
申请日：2006-08-18
申请人： TERAVICTA TECHNOLOGIES INC , YEE IAN Y K , FLYNN WILLIAM G
发明人： YEE IAN Y K , FLYNN WILLIAM G
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H2059/0072
摘要： A plate-based microelectromechanical system (MEMS) switch (20) is provided which includes a moveable plate (22) suspended above a substrate and a plurality of arms (36) extending from the periphery of the moveable plate (22) . The moveable plate includes a first electrode suspended over a second electrode arranged on the substrate and a first input/output signal contact structure electrically isolated from the first electrode. In some embodiments, the first input/output signal contact structure is arranged proximate to the edge of the moveable plate (22) . In addition or alternatively, one of the arms (36) is electrically coupled to the first input/output signal contact structure and comprises an input/output signal trace. A cantilever-based MEMS switch is provided which includes a cantilever structure with a first electrode suspended (over) a second electrode arranged upon a substrate. In addition, the cantilever structure includes an input/output signal line spaced apart from the first electrode and arranged above an input/output signal contact structure.
摘要翻译：提供了一种基于板的微机电系统（MEMS）开关（20），其包括悬挂在基板上方的可移动板（22）和从可移动板（22）的周边延伸的多个臂（36）。可移动板包括悬挂在布置在基板上的第二电极上的第一电极和与第一电极电隔离的第一输入/输出信号接触结构。在一些实施例中，第一输入/输出信号接触结构被布置成靠近可移动板（22）的边缘。另外或替代地，臂（36）中的一个电耦合到第一输入/输出信号接触结构并且包括输入/输出信号迹线。提供了一种基于悬臂的MEMS开关，其包括悬臂结构，其中悬置（上）第一电极布置在基板上的第二电极。此外，悬臂结构包括与第一电极间隔开并布置在输入/输出信号接触结构之上的输入/输出信号线。

7. 发明申请

WO2004028953A3 MICROELECTROMECHANICAL DEVICE HAVING AN ACTIVE OPENING SWITCH 审中-公开
公开(公告)号：WO2004028953A3
公开(公告)日：2004-04-08
申请号：PCT/US2003/031239
申请日：2003-09-30
申请人： TERAVICTA TECHNOLOGIES, INC.
发明人： NELSON, Richard, D.
IPC分类号： B81B3/00
摘要： A microelectromechanical device is provided which includes a beam configured to apply an opening force on a closed switch. The opening force may be substantially independent of a force stored in the closed switch. A combination of the force applied by the beam and the force stored in the closed switch may be sufficient to open the switch after removal of a force associated with actuation of the switch. Another micro-electromechanical device includes a switch beam spaced above a closing gate and a contact structure. The device may also include an additional beam configured to apply a force on the switch beam in a direction away from the contact structure. A method for opening a switch includes reducing an attractive force between a switch beam and a closing gate. The method also includes externally applying a mechanical force on the switch beam in a direction away from the closing gate.

8. 发明申请

WO2007022500A2 MICROELECTROMECHANICAL SWITCHES HAVING MECHANICALLY ACTIVE COMPONENTS WHICH ARE ELECTRICALLY ISOLATED FROM COMPONENTS OF THE SWITCH USED FOR THE TRANSMISSION OF SIGNALS 审中-公开
标题翻译：具有用于传输信号的开关的组件电动分离的机械有源组件的微电子开关
公开(公告)号：WO2007022500A2
公开(公告)日：2007-02-22
申请号：PCT/US2006/032567
申请日：2006-08-18
申请人： TERAVICTA TECHNOLOGIES, INC. , YEE, Ian, Y., K. , FLYNN, William, G.
发明人： YEE, Ian, Y., K. , FLYNN, William, G.
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H2059/0072
摘要： A plate-based microelectromechanical system (MEMS) switch is provided which includes a moveable plate suspended above a substrate and a plurality of arms extending from the periphery of the moveable plate. The moveable plate includes a first electrode suspended over a second electrode arranged on the substrate and a first input/output signal contact structure electrically isolated from the first electrode. In some embodiments, the first input/output signal contact structure is arranged proximate to the edge of the moveable plate. In addition or alternatively, one of the arms is electrically coupled to the first input/output signal contact structure and comprises an input/output signal trace. A cantilever-based MEMS switch is provided which includes a cantilever structure with a first electrode suspended a second electrode arranged upon a substrate. In addition, the cantilever structure includes an input/output signal line spaced apart from the first electrode and arranged above an input/output signal contact structure.
摘要翻译：提供了一种基于板的微机电系统（MEMS）开关，其包括悬挂在基板上的可移动板和从可移动板的周边延伸的多个臂。可移动板包括悬置在布置在基板上的第二电极上的第一电极和与第一电极电隔离的第一输入/输出信号接触结构。在一些实施例中，第一输入/输出信号接触结构被布置成靠近可移动板的边缘。另外或替代地，一个臂电耦合到第一输入/输出信号接触结构并且包括输入/输出信号迹线。提供了一种基于悬臂的MEMS开关，其包括悬臂结构，其中第一电极悬置在衬底上的第二电极。此外，悬臂结构包括与第一电极间隔开并布置在输入/输出信号接触结构之上的输入/输出信号线。

9. 发明申请

WO2004021382A3 MICRO-ELECTROMECHANICAL SWITCH PERFORMANCE ENHANCEMENT 审中-公开
公开(公告)号：WO2004021382A3
公开(公告)日：2004-03-11
申请号：PCT/US2003/026696
申请日：2003-08-26
申请人： TERAVICTA TECHNOLOGIES, INC.
发明人： IVANCIW, Dan, A. , HILBERT, Claude
IPC分类号： H01H59/00
摘要： In methods and circuits for using associated circuitry to enhance performance of a micro-electromechanical switch, one of the method embodiments is a contact conditioning process including applying a time-varying voltage to the control element of a closed switch. In another embodiment, a voltage profile applied to the control element of the switch can be tailored to improve the actuation speed or reliability of the switch. In another method embodiment, the performance of a switch may be evaluated by measuring a performance parameter, and corrective action initiated if the switch performance is determined to need improvement. An embodiment of a circuit for maintaining performance of a micro-electromechanical switch includes first and second signal line nodes, sensing circuitry coupled to the signal line nodes and adapted to sense a performance parameter value of the switch, and control circuitry operably coupled to at least one terminal of the switch.

10. 发明申请

WO2004021382A2 MICRO-ELECTROMECHANICAL SWITCH PERFORMANCE ENHANCEMENT 审中-公开
标题翻译：微机电开关性能提升
公开(公告)号：WO2004021382A2
公开(公告)日：2004-03-11
申请号：PCT/US0326696
申请日：2003-08-26
申请人： TERAVICTA TECHNOLOGIES INC
发明人： IVANCIW DAN A , HILBERT CLAUDE
IPC分类号： B81B3/00 , B81B7/02 , H01H1/00 , H01H1/60 , H01H9/00 , H01H11/00 , H01H47/00 , H01H47/04 , H01H49/00 , H01H59/00
CPC分类号： H01H1/605 , H01H1/0015 , H01H1/60 , H01H11/0062 , H01H47/04 , H01H59/0009 , H01H2059/0063 , Y10T307/911 , Y10T307/924
摘要： In methods and circuits for using associated circuitry to enhance performance of a micro-electromechanical switch, one of the method embodiments is a contact conditioning process including applying a time-varying voltage to the control element of a closed switch. In another embodiment, a voltage profile applied to the control element of the switch can be tailored to improve the actuation speed or reliability of the switch. In another method embodiment, the performance of a switch may be evaluated by measuring a performance parameter, and corrective action initiated if the switch performance is determined to need improvement. An embodiment of a circuit for maintaining performance of a micro-electromechanical switch includes first and second signal line nodes, sensing circuitry coupled to the signal line nodes and adapted to sense a performance parameter value of the switch, and control circuitry operably coupled to at least one terminal of the switch.
摘要翻译：在用于使用关联电路来增强微机电开关的性能的方法和电路中，方法实施例之一是接触调节过程，包括对闭合开关的控制元件施加时变电压。在另一个实施例中，可以调整施加到开关的控制元件的电压分布，以改善开关的致动速度或可靠性。在另一方法实施例中，可以通过测量性能参数来评估交换机的性能，并且如果确定开关性能需要改进，则启动校正动作。用于维持微机电开关的性能的电路的一个实施例包括第一和第二信号线节点，耦合到信号线节点的感测电路，并且适于感测开关的性能参数值，以及可操作地耦合至少一个终端的交换机。

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