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    • 1. 发明申请
    • SEMICONDUCTOR APPARATUS
    • WO2005038921A1
    • 2005-04-28
    • PCT/JP2004/015328
    • 2004-10-08
    • TOYOTA JIDOSHA KABUSHIKI KAISHATAKI, MasatoTOJIMA, Hideki
    • TAKI, MasatoTOJIMA, Hideki
    • H01L27/06
    • H01L29/7816H01L27/092H01L29/0615H01L29/0649H01L29/0653H01L29/408H01L29/7824H01L29/7835
    • A semiconductor apparatus (100) comprises a low potential reference circuit region (1) and a high potential reference circuit region (2), and the high potential reference circuit region (2) is surrounded by a high withstand voltage separating region (3). By a trench (4) formed in the outer periphery of the high withstand voltage separating region (3), the low potential reference circuit region (1) and high potential reference circuit region (2) are separated from each other. Further, the trench (4) is filled up with an insulating material, and insulates the low potential reference circuit region (1) and high potential reference circuit region (2). The high withstand voltage separating region (3) is partitioned by the trench (4), high withstand voltage NMOS (5) or high withstand voltage PMOS (6) is provided in the partitioned position.
    • 半导体装置(100)包括低电位基准电路区域(1)和高电位基准电路区域(2),高电位基准电路区域(2)由高耐压分离区域(3)包围。 通过形成在高耐压分离区域(3)的外周的沟槽(4),低电位基准电路区域(1)和高电位基准电路区域(2)彼此分离。 此外,沟槽(4)填充有绝缘材料,并使低电位参考电路区域(1)和高电位参考电路区域(2)绝缘。 高耐压分离区域(3)由沟槽(4)分隔开,在分隔位置设有高耐压NMOS(5)或高耐压PMOS(6)。