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1. 发明申请

WO2012155284A1 WAVEGUIDE-MEMS PHASE SHIFTER 审中-公开
标题翻译：波形MEMS相变器
公开(公告)号：WO2012155284A1
公开(公告)日：2012-11-22
申请号：PCT/CH2012/000110
申请日：2012-05-16
申请人： ETH Zurich , HESSELBARTH, Jan , PSYCHOGIOU, Dimitra
发明人： HESSELBARTH, Jan , PSYCHOGIOU, Dimitra
IPC分类号： H01P1/18
CPC分类号： H01P1/182
摘要： The disclosed invention relates to a device to efficiently realize (that is, with low dissipative loss) a large variable phase shift in a millimeter wavelength electromagnetic wave. Accordingly, a phase shifter device (1) is disclosed which comprises an axially extended waveguide (2) with a cavity (20) for conducting the electromagnetic wave, a MEMS-actuation mechanism (3), and a plurality of conductive fingers (4, 4a, 4b) which - due to their mechanical movement by means of the MEMS-actuator (3) - adjust a distributed electrical capacitance in the waveguide (2) and thus cause the adjustable phase shift to the electromagnetic wave. Specifically, at least two conductive fingers (4a, 4b) are arranged at an axial distance in a side wall (22) of the waveguide (2). By rotating opposing ends of these fingers into the cavity (20) of the waveguide (2) towards the opposing surface, which can have a predefined elevation profile, a large adjustable phase shift is achieved due to the distributed interaction between the fingers and the electromagnetic wave. Furthermore, by integrating the MEMS device directly into an air-filled metallic waveguide, a low-loss, high-power handling system is realized.
摘要翻译：所公开的发明涉及一种在毫米波长电磁波中有效实现（即具有低耗散损耗））大的可变相移的装置。因此，公开了一种移相器件（1），其包括具有用于传导电磁波的空腔（20）的轴向延伸的波导（2），MEMS致动机构（3）和多个导电指状物由于其通过MEMS致动器（3）的机械移动，调节波导（2）中的分布式电容，并且因此引起可调节的相移到电磁波。具体地说，至少两个导电指状物（4a，4b）在波导管（2）的侧壁（22）中以轴向距离布置。通过将这些指状物的相对端旋转到波导（2）的空腔（20）中朝向可以具有预定仰角轮廓的相对表面，由于手指与电磁线圈之间的分布相互作用，可实现大的可调相移波。此外，通过将MEMS器件直接集成到充满空气的金属波导中，实现了低损耗大功率处理系统。

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