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    • 1. 发明申请
    • SELF-SEALED FLUIDIC CHANNELS FOR A NANOPORE ARRAY
    • 自封式流体通道用于NANOPORE ARRAY
    • WO2012145088A1
    • 2012-10-26
    • PCT/US2012/028231
    • 2012-03-08
    • INTERNATIONAL BUSINESS MACHINES CORP.DANG, BingPENG, Hongbo
    • DANG, BingPENG, Hongbo
    • H01L51/10
    • B82Y15/00G01N33/48721Y10S977/70Y10S977/704Y10S977/712Y10S977/84Y10S977/856
    • A method of forming a nanopore array includes patterning a front layer of a substrate to form front trenches, the substrate including a buried layer disposed between the front layer and a back layer; depositing a membrane layer over the patterned front layer and in the front trenches; patterning the back layer and the buried layer to form back trenches, the back trenches being aligned with the front trenches; forming a plurality of nanopores through the membrane layer; depositing a sacrificial material in the front trenches and the back trenches; depositing front and back insulating layers over the sacrificial material; and heating the sacrificial material to a decomposition temperature of the sacrificial material to remove the sacrificial material and form pairs of front and back channels, wherein the front channel of each channel pair is connected to the back channel of its respective channel pair by an individual nanopore.
    • 形成纳米孔阵列的方法包括使衬底的前层图形化以形成前沟槽,所述衬底包括设置在前层和背层之间的掩埋层; 在图案化的前层和前沟槽上沉积膜层; 图案化背层和掩埋层以形成背沟,后沟与前沟槽对齐; 通过膜层形成多个纳米孔; 在前沟槽和后沟槽中沉积牺牲材料; 在所述牺牲材料上沉积前后绝缘层; 并且将所述牺牲材料加热至所述牺牲材料的分解温度以去除所述牺牲材料并形成一对前和后通道,其中每个通道对的前通道通过单独的纳米孔连接到其相应通道对的后通道 。