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    • 4. 发明申请
    • MANUFACTURING METHOD OF INVERSE STAGGERED POLY-SI TFT WITH CENTER OFF-SET
    • 具有中心偏移的反相聚合多晶硅TFT的制造方法
    • WO2009134075A3
    • 2010-03-04
    • PCT/KR2009002255
    • 2009-04-29
    • KYUNGHEE UNIVERSITY IND & ACADJANG JINOH JAE-HWANKANG DONG-HAN
    • JANG JINOH JAE-HWANKANG DONG-HAN
    • H01L29/78
    • H01L29/66765H01L29/42384
    • Disclosed herein is a method for manufacturing a poly-Si TFT with a center offset structure, including (1) preparing a buffer layer on a substrate, (2) preparing a gate electrode with a center offset structure on the buffer layer, (3) forming a gate insulating film on the gate electrode, (4) forming an active layer on the gate insulating film, (5) depositing an n+ amorphous silicon based ohmic contact layer over the active layer, (6) placing source/drain electrodes on the n+ amorphous silicon based ohmic contact layer, and (7) forming a passivation film as a protective layer on the source/drain electrodes. According to the disclosed method, an offset pattern is formed in the center of a gate constituting the TFT to form an offset region in the middle of an active layer channel, so that complicated processes for fabrication of the TFT may be simplified and leakage current may be noticeably inhibited.
    • 本发明公开了一种制造具有中心偏移结构的多晶硅TFT的方法,包括(1)在衬底上制备缓冲层,(2)在缓冲层上制备具有中心偏移结构的栅电极,(3) 在栅电极上形成栅极绝缘膜,(4)在栅极绝缘膜上形成有源层,(5)在有源层上沉积n +非晶硅基欧姆接触层,(6)将源极/漏极放置在 n +非晶硅基欧姆接触层,(7)在源极/漏极上形成钝化膜作为保护层。 根据所公开的方法,在构成TFT的栅极的中心处形成偏移图案以在有源层通道的中间形成偏移区域,从而可以简化用于制造TFT的复杂工艺,并且漏电流可以 明显受到抑制
    • 7. 发明申请
    • MANUFACTURING METHOD OF INVERSE STAGGERED POLY-SI TFT WITH CENTER OFF-SET
    • 具有中心偏移的反相聚合多晶硅TFT的制造方法
    • WO2009134075A2
    • 2009-11-05
    • PCT/KR2009002255
    • 2009-04-29
    • KYUNGHEE UNIVERSITY IND & ACADJANG JINOH JAE-HWANKANG DONG-HAN
    • JANG JINOH JAE-HWANKANG DONG-HAN
    • H01L29/78
    • H01L29/66765H01L29/42384
    • Disclosed herein is a method for manufacturing a poly-Si TFT with a center offset structure, including (1) preparing a buffer layer on a substrate, (2) preparing a gate electrode with a center offset structure on the buffer layer, (3) forming a gate insulating film on the gate electrode, (4) forming an active layer on the gate insulating film, (5) depositing an n+ amorphous silicon based ohmic contact layer over the active layer, (6) placing source/drain electrodes on the n+ amorphous silicon based ohmic contact layer, and (7) forming a passivation film as a protective layer on the source/drain electrodes. According to the disclosed method, an offset pattern is formed in the center of a gate constituting the TFT to form an offset region in the middle of an active layer channel, so that complicated processes for fabrication of the TFT may be simplified and leakage current may be noticeably inhibited.
    • 本发明公开了一种制造具有中心偏移结构的多晶硅TFT的方法,包括(1)在衬底上制备缓冲层,(2)在缓冲层上制备具有中心偏移结构的栅电极,(3) 在栅电极上形成栅极绝缘膜,(4)在栅极绝缘膜上形成有源层,(5)在有源层上沉积n +非晶硅基欧姆接触层,(6)将源极/漏极放置在 n +非晶硅基欧姆接触层,(7)在源极/漏极上形成钝化膜作为保护层。 根据所公开的方法,在构成TFT的栅极的中心处形成偏移图案以在有源层通道的中间形成偏移区域,从而可以简化用于制造TFT的复杂工艺,并且漏电流可以 明显受到抑制