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    • 1. 发明申请
    • SPINWAVE BASED NONDESTRUCTIVE MATERIAL, STRUCTURE, COMPONENT, OR DEVICE TESTING TOOLS
    • 基于旋转的非结构材料,结构,组件或设备测试工具
    • WO2012121673A1
    • 2012-09-13
    • PCT/SG2012/000074
    • 2012-03-07
    • NATIONAL UNIVERSITY OF SINGAPOREYANG, HyunsooMUKHERJEE, Sankha SubhraKWON, Jae Hyun
    • YANG, HyunsooMUKHERJEE, Sankha SubhraKWON, Jae Hyun
    • G01N24/00
    • G01N24/10G01N22/00G01R33/60
    • Systems and methods for spinwave-based metrology in accordance with embodiments of the disclosure involve generating and detecting spinwaves in a sample having a ferromagnetic material; and determining a material thickness, a material integrity measure, a presence of a manufacturing defect, a categorical type of manufacturing defect, and/or a manufacturing process statistic corresponding to spinwave behavior in the sample. In an embodiment, spinwaves are generated by way of concurrent exposure of a target measurement site of the sample to each of a bias magnetic field and radiation (e.g., microwave or radio frequency radiation) produced by a first set of integrated waveguides. A response signal corresponding to a behavior of spinwaves within the target measurement site can be generated by way of a second set of integrated waveguides. Various embodiments of systems and methods for generating spinwaves, detecting spinwaves, and calculating, analyzing, or monitoring one or more sample properties can be automated.
    • 根据本公开的实施例的用于基于旋波的计量学的系统和方法包括在具有铁磁材料的样品中产生和检测旋转波; 并且确定材料厚度,材料完整性度量,存在制造缺陷,分类类型的制造缺陷,和/或与样品中的旋转波行为相对应的制造过程统计量。 在一个实施例中,通过将样品的目标测量部位同时暴露于由第一组集成波导产生的偏置磁场和辐射(例如,微波或射频辐射)中的每一个产生旋转波。 可以通过第二组集成波导来产生对应于目标测量位置内旋转波的行为的响应信号。 可以自动地生成用于产生旋风波,检测旋流和计算,分析或监测一个或多个样品性质的系统和方法的各种实施方案。