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    • 3. 发明申请
    • A METHOD FOR PRODUCING A THIN SEMICONDUCTOR CHIP
    • 一种生产半导体芯片的方法
    • WO2007122438A1
    • 2007-11-01
    • PCT/IB2006/000966
    • 2006-04-21
    • INFINEON TECHNOLOGIES AGKRÖNINGER, WernerKOTEK, ManfredKOLLER, AdolfMOHAMED, Abdul, Rahman
    • KRÖNINGER, WernerKOTEK, ManfredKOLLER, AdolfMOHAMED, Abdul, Rahman
    • H01L21/68H01L21/78
    • H01L21/78H01L21/6835H01L2221/68318H01L2221/68331
    • A method of fabricating a semiconductor chip, the method includes the step of providing an adhesive layer (6) on the outer area of the active surface (13) of a device wafer (1) . Next, a rigid body (3) is attached to the active surface (13) of the device wafer (1) by the adhesive layer (6) . After this, the device wafer (1) is thinned by treating the passive surface of the device wafer (1) that is opposite to the active surface (13) . Following this, a first backing tape (21, 23) is connected to the passive surface of the device wafer (1) . Then, the outer portion (32) of the rigid body (3) is separated from the central portion (33) of the rigid body (3) . In addition, the outer portion (12) of the device wafer (1) is separated from the central portion (14) of the device wafer (1) . After this, the central portion (33) of the rigid body (3) is removed from the first backing tape (21, 23) . Next, the outer portion (12) of the device wafer (1) and the outer portion (32) of the rigid body (3) is removed from the first backing tape (21, 23) . After this, the device wafer (1) is diced into semiconductor chips .
    • 一种制造半导体芯片的方法,该方法包括在器件晶片(1)的有源表面(13)的外部区域上提供粘合剂层(6)的步骤。 接下来,通过粘合剂层(6)将刚体(3)附接到装置晶片(1)的有源表面(13)。 之后,通过处理与有源表面(13)相对的器件晶片(1)的被动表面,使器件晶片(1)变薄。 之后,第一背衬带(21,23)连接到器件晶片(1)的被动表面。 然后,刚性体(3)的外部(32)与刚体(3)的中心部分(33)分离。 另外,器件晶片(1)的外部部分(12)与器件晶片(1)的中心部分(14)分离。 此后,刚性体(3)的中心部分(33)从第一背衬带(21,23)移除。 接下来,从第一背衬带(21,23)移除装置晶片(1)的外部部分(12)和刚体(3)的外部部分(32)。 之后,将器件晶片(1)切成半导体芯片。