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1. 发明申请

WO1988008512A1 NON-CONTACT HIGH RESOLUTION DISPLACEMENT MEASUREMENT TECHNIQUE 审中-公开
标题翻译：非接触式高分辨率位移测量技术
公开(公告)号：WO1988008512A1
公开(公告)日：1988-11-03
申请号：PCT/US1988001181
申请日：1988-04-11
申请人： MCT SYNERCEPTION, INC.
发明人： MCT SYNERCEPTION, INC. , SABERSKY, Andrew, P. , LITTLESTONE, Nicholas , ABBOTT, Jack, E. , GIBBONS, William, J. , D'ORAZIO, Robert, R., J. , SMITH, Nathan, R.
IPC分类号： G01B11/14
CPC分类号： H01L21/67259 , G01B11/028 , H05K13/08
摘要： An apparatus for optically detecting the position of an edge (114) of a workpiece in a sensing plane (110), involving the emission of electromagnetic energy from a known source region (100) in the sensing plane (110) such as to cause the edge (114) to create a shadow having a penumbra in the sensing plane (110). Two detectors (106, 108) are provided for determining the amount of energy which reaches two known detection regions in the sensing plane (110) and wholly within the penumbra. A mathematical derivation shows that the amount of energy detected by one detector (106) determines a first curve in the sensing plane (110) on which the edge must lie, and the amount of energy detected by the other detector (108) determines a second curve in the sensing plane (110) on which the edge (114) must lie. The intersection of these two curves fully determine the position of the edge (114) in the sensing plane (110).
摘要翻译：一种用于光学地检测感测平面（110）中的工件的边缘（114）的位置的装置，其涉及从感测平面（110）中的已知源区域（100）发射电磁能，以使得边缘（114）以产生在感测平面（110）中具有半影的阴影。提供两个检测器（106,108），用于确定在感测平面（110）中并且完全在半影中达到两个已知检测区域的能量的量。数学推导表明，由一个检测器（106）检测的能量量确定在其上必须位于其上的感测平面（110）中的第一曲线，并且由另一检测器（108）检测的能量量确定第二边缘（114）必须在其上的传感平面（110）中的曲线。这两条曲线的交点完全确定边缘（114）在感测平面（110）中的位置。

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