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1. 发明申请

WO2007059315A2 ARRAY TEST USING THE SHORTING BAR AND HIGH FREQUENCY CLOCK SIGNAL FOR THE INSPECTION OF TFT-LCD WITH INTEGRATED DRIVER IC 审中-公开
标题翻译：使用集成驱动器IC检查TFT-LCD的短条和高频时钟信号的阵列测试
公开(公告)号：WO2007059315A2
公开(公告)日：2007-05-24
申请号：PCT/US2006/044688
申请日：2006-11-15
申请人： PHOTON DYNAMICS, INC. , JUN, Mike , ERSAHIN, Atila , MCGINLEY, Barry , SANJEEVI, Sabari
发明人： JUN, Mike , ERSAHIN, Atila , MCGINLEY, Barry , SANJEEVI, Sabari
IPC分类号： G01R31/00
CPC分类号： G09G3/006 , G09G3/3648 , G09G3/3677 , G09G2300/0408 , G09G2300/0426
摘要： In accordance with the present invention, a first shorting bar drives the data lines of a TFT array having integrated gate driver circuitry. Another set of shorting bars drive the corresponding terminals of the gate driver circuitry. The pixel voltages are measured after all the pixels are charged by the driving signals applied to the shorting bars. Gate voltages are progressively applied to the gate lines by the gate driver integrated circuit (IC) via the set of shorting bars that, in turn, are driven by clock signals received from one or more pattern generators. Voltages are concurrently applied to the data lines which are connected together by the first shorting bar. The application of voltages generates a display pattern that is subsequently compared to an expected display pattern. By comparing the resulting display pattern and the expected display pattern, possible defects are detected.
摘要翻译：根据本发明，第一短路棒驱动具有集成栅极驱动器电路的TFT阵列的数据线。另一组短路棒驱动栅极驱动器电路的相应端子。在通过施加到短路棒的驱动信号对所有像素进行充电之后，测量像素电压。栅极电压通过栅极驱动器集成电路（IC）经由一组短路棒逐渐施加到栅极线，该组短路棒又由从一个或多个图案发生器接收的时钟信号驱动。电压同时施加到由第一短路棒连接在一起的数据线。电压的应用产生随后与期望的显示图案进行比较的显示图案。通过比较所得到的显示图案和预期的显示图案，检测到可能的缺陷。

2. 发明申请

WO2007027960A2 SUBSTRATE ALIGNMENT USING LINEAR ARRAY SENSOR 审中-公开
标题翻译：使用线性阵列传感器进行基板对准
公开(公告)号：WO2007027960A2
公开(公告)日：2007-03-08
申请号：PCT/US2006034129
申请日：2006-08-29
申请人： PHOTON DYNAMICS INC , MCGINLEY BARRY , JONES LLOYD , PUN DIGBY , BARNETT ROBERT
发明人： MCGINLEY BARRY , JONES LLOYD , PUN DIGBY , BARNETT ROBERT
IPC分类号： G01N23/00
CPC分类号： G01B11/272 , G03F9/7011 , G03F9/7088
摘要： The position of a substrate's edge is detected using a substrate alignment system that includes, in part, a light source, an optical module adapted to receive a light emanating from the light source to form a multi-dimensional light beam; and an array sensor positioned at a focal plane of the optical module and oriented substantially perpendicular to the sample's edge. The substrate alignment system detects the substrate's edge position as soon as the substrate is loaded and placed within the capture range of the linear array sensor. As long as the substrate's edge position is within the capture range, the substrate does not have to be moved to determine its position relative to the tool's coordinate space. The capture range is substantially larger than the position accuracy required. The sensor array includes a multitude of sensors disposed along one or more rows.
摘要翻译：使用衬底对准系统检测衬底边缘的位置，所述衬底对准系统部分地包括光源，适于接收从光源发出的光以形成多维光束的光学模块; 以及阵列传感器，其定位在光学模块的焦平面处并且基本上垂直于样本的边缘定向。一旦衬底被加载并放置在线性阵列传感器的捕获范围内，衬底对准系统就检测衬底的边缘位置。只要衬底的边缘位置在捕获范围内，衬底就不必移动以确定其相对于工具坐标空间的位置。捕捉范围远远大于所需的位置精度。传感器阵列包括沿着一行或多行布置的多个传感器。

3. 发明申请

WO2007059315A3 ARRAY TEST USING THE SHORTING BAR AND HIGH FREQUENCY CLOCK SIGNAL FOR THE INSPECTION OF TFT-LCD WITH INTEGRATED DRIVER IC 审中-公开
标题翻译：使用集成驱动器IC检查TFT-LCD的短条和高频时钟信号的阵列测试
公开(公告)号：WO2007059315A3
公开(公告)日：2008-01-10
申请号：PCT/US2006044688
申请日：2006-11-15
申请人： PHOTON DYNAMICS INC , JUN MIKE , ERSAHIN ATILA , MCGINLEY BARRY , SANJEEVI SABARI
发明人： JUN MIKE , ERSAHIN ATILA , MCGINLEY BARRY , SANJEEVI SABARI
IPC分类号： G01R31/08 , G01R31/00 , G02F1/1343 , G06K9/00
CPC分类号： G09G3/006 , G09G3/3648 , G09G3/3677 , G09G2300/0408 , G09G2300/0426
摘要： In accordance with the present invention, a first shorting bar (608subl) drives the data lines (606) of a TFT array (402) having integrated gate driver circuitry. Another set of shorting bars (450) drive the corresponding terminals of the gate driver circuitry (404). The pixel voltages are measured after all the pixels are charged by the driving signals applied to the shorting bars (Vdd, Vst, CK1, etc). Gate voltages are progressively applied to the gate lines by the gate driver integrated circuit via the set of shorting bars that, in turn, are driven by clock signals received from one or more pattern generators. Voltages are concurrently applied to the data lines which are connected together by the first shorting bar. The application of voltages generates a display pattern that is subsequently compared to an expected display pattern. By comparing the resulting display pattern and the expected display pattern, possible defects are detected.
摘要翻译：根据本发明，第一短路棒（608subl）驱动具有集成栅极驱动器电路的TFT阵列（402）的数据线（606）。另一组短路棒（450）驱动栅极驱动器电路（404）的相应端子。在通过施加到短路棒（Vdd，Vst，CK1等）的驱动信号对所有像素进行充电之后，测量像素电压。栅极电压通过栅极驱动器集成电路逐渐施加到栅极线，该组短路棒又由从一个或多个图案发生器接收的时钟信号驱动。电压同时施加到由第一短路棒连接在一起的数据线。电压的应用产生随后与期望的显示图案进行比较的显示图案。通过比较所得到的显示图案和预期的显示图案，检测到可能的缺陷。

4. 发明申请

WO2007027960A3 SUBSTRATE ALIGNMENT USING LINEAR ARRAY SENSOR 审中-公开
公开(公告)号：WO2007027960A3
公开(公告)日：2007-03-08
申请号：PCT/US2006/034129
申请日：2006-08-29
申请人： PHOTON DYNAMICS, INC. , MCGINLEY, Barry , JONES, Lloyd , PUN, Digby , BARNETT, Robert
发明人： MCGINLEY, Barry , JONES, Lloyd , PUN, Digby , BARNETT, Robert
IPC分类号： H01L27/00
摘要： The position of a substrate's edge is detected using a substrate alignment system that includes, in part, a light source, an optical module adapted to receive a light emanating from the light source to form a multi-dimensional light beam; and an array sensor positioned at a focal plane of the optical module and oriented substantially perpendicular to the sample's edge. The substrate alignment system detects the substrate's edge position as soon as the substrate is loaded and placed within the capture range of the linear array sensor. As long as the substrate's edge position is within the capture range, the substrate does not have to be moved to determine its position relative to the tool's coordinate space. The capture range is substantially larger than the position accuracy required. The sensor array includes a multitude of sensors disposed along one or more rows.

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